RD53AtestingatCERN < Main

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---+ !RD53A !testing@CERN

%TOC%
---++ KEK53-4

*ch-pitch : 50×50um*

*BR&#x4E0B; !SiO2&#x819C; : STD*

*PolySi-Al&#x9593;&#x306E;SiO2&#x819C; : STD*

*Poly-Si&#x62B5;&#x6297; : 10k&Omega;/&#x25A1;*
|  *Region*  |  *Poly-Si*  |  *N+ size*  |  *plot*  ||
|  1  |  &#x6709;  |  Large  | <img alt="KEK53-4_region1.png" src="%ATTACHURL%/KEK53-4_region1.png" /> | <img alt="KEK53-4_no0_region1.png" src="%ATTACHURL%/KEK53-4_no0_region1.png" /> |
|  2  | ^ |  STD  | <img alt="KEK53-4_region2.png" src="%ATTACHURL%/KEK53-4_region2.png" /> | <img alt="KEK53-4_no0_region2.png" src="%ATTACHURL%/KEK53-4_no0_region2.png" /> |
|  3  |  &#x7121;  |  Large  | <img alt="KEK53-4_region3.png" src="%ATTACHURL%/KEK53-4_region3.png" /> | <img alt="KEK53-4_no0_region3.png" src="%ATTACHURL%/KEK53-4_no0_region3.png" /> |
|  4  | ^ |  STD  | <img alt="KEK53-4_region4.png" src="%ATTACHURL%/KEK53-4_region4.png" /> | <img alt="KEK53-4_no0_region4.png" src="%ATTACHURL%/KEK53-4_no0_region4.png" /> |
---++ KEK53-5

*ch-pitch : 50×50um*

*BR&#x4E0B; !SiO2&#x819C; : STD*

*PolySi-Al&#x9593;&#x306E;SiO2&#x819C; : STD*

*Poly-Si&#x62B5;&#x6297; : 10k&Omega;/&#x25A1;*
|  *Region*  |  *Poly-Si*  |  *N+ size*  |  *plot*  ||
|  1  |  &#x6709;  |  Large  | | |
|  2  | ^ |  STD  | | |
|  3  |  &#x7121;  |  Large  | | |
|  4  | ^ |  STD  | | |
---++ KEK53-6

*ch-pitch : 50×50um*

*BR&#x4E0B; !SiO2&#x819C; : STD*

*PolySi-Al&#x9593;&#x306E;SiO2&#x819C; : STD*

*Poly-Si&#x62B5;&#x6297; : 10k&Omega;/&#x25A1;*
|  *Region*  |  *Poly-Si*  |  *N+ size*  |  *plot*  ||
|  1  |  &#x6709;  |  Large  | <img alt="KEK53-6_region1.png" src="%ATTACHURL%/KEK53-6_region1.png" /> | <img alt="KEK53-6_no0_region1.png" src="%ATTACHURL%/KEK53-6_no0_region1.png" /> |
|  2  | ^ |  STD  | <img alt="KEK53-6_region2.png" src="%ATTACHURL%/KEK53-6_region2.png" /> | <img alt="KEK53-6_no0_region2.png" src="%ATTACHURL%/KEK53-6_no0_region2.png" /> |
|  3  |  &#x7121;  |  Large  | <img alt="KEK53-6_region3.png" src="%ATTACHURL%/KEK53-6_region3.png" /> | <img alt="KEK53-6_no0_region3.png" src="%ATTACHURL%/KEK53-6_no0_region3.png" /> |
|  4-1  | ^ |  STD  | <img alt="KEK53-6_region4-1.png" src="%ATTACHURL%/KEK53-6_region4-1.png" /> | <img alt="KEK53-6_no0_region4-1.png" src="%ATTACHURL%/KEK53-6_no0_region4-1.png" /> |
|  4-2  | ^ |  Small  | <img alt="KEK53-6_region4-2.png" src="%ATTACHURL%/KEK53-6_region4-2.png" /> | <img alt="KEK53-6_no0_region4-2.png" src="%ATTACHURL%/KEK53-6_no0_region4-2.png" /> |
---++ KEK53-7

*ch-pitch : %RED%25×100um%ENDCOLOR%*

*BR&#x4E0B; !SiO2&#x819C; : STD*

*PolySi-Al&#x9593;&#x306E;SiO2&#x819C; : STD*

*Poly-Si&#x62B5;&#x6297; : 10k&Omega;/&#x25A1;*
|  *Region*  |  *Poly-Si*  |  *N+ size*  |  *plot*  ||
|  1  |  &#x6709;  |  Large  | <img alt="KEK53-7_region1.png" src="%ATTACHURL%/KEK53-7_region1.png" /> | <img alt="KEK53-7_no0_region1.png" src="%ATTACHURL%/KEK53-7_no0_region1.png" /> |
|  2  | ^ |  STD  | <img alt="KEK53-7_region2.png" src="%ATTACHURL%/KEK53-7_region2.png" /> | <img alt="KEK53-7_no0_region2.png" src="%ATTACHURL%/KEK53-7_no0_region2.png" /> |
|  3  |  &#x7121;  |  Large  | <img alt="KEK53-7_region3.png" src="%ATTACHURL%/KEK53-7_region3.png" /> | <img alt="KEK53-7_no0_region3.png" src="%ATTACHURL%/KEK53-7_no0_region3.png" /> |
|  4  | ^ |  STD  | <img alt="KEK53-7_region4.png" src="%ATTACHURL%/KEK53-7_region4.png" /> | <img alt="KEK53-7_no0_region4.png" src="%ATTACHURL%/KEK53-7_no0_region4.png" /> |
---++ KEK53-8

*ch-pitch : %RED%25×100um%ENDCOLOR%*

*BR&#x4E0B; !SiO2&#x819C; : STD*

*PolySi-Al&#x9593;&#x306E;SiO2&#x819C; : STD*

*Poly-Si&#x62B5;&#x6297; : 10k&Omega;/&#x25A1;*
|  *Region*  |  *Poly-Si*  |  *N+ size*  |  *plot*  ||
|  1  |  &#x6709;  |  Large  | | |
|  2  | ^ |  STD  | | |
|  3  |  &#x7121;  |  Large  | | |
|  4  | ^ |  STD  | | |
---++ KEK53-9

*ch-pitch : 50×50um*

*BR&#x4E0B; !SiO2&#x819C; : STD*

*PolySi-Al&#x9593;&#x306E;SiO2&#x819C; : %RED%thick%ENDCOLOR%*

*Poly-Si&#x62B5;&#x6297; : 10k&Omega;/&#x25A1;*
|  *Region*  |  *Poly-Si*  |  *N+ size*  |  *plot*  ||
|  1  |  &#x6709;  |  Large  | <img alt="KEK53-9_region1.png" src="%ATTACHURL%/KEK53-9_region1.png" /> | <img alt="KEK53-9_no0_region1.png" src="%ATTACHURL%/KEK53-9_no0_region1.png" /> |
|  2  | ^ |  STD  | <img alt="KEK53-9_region2.png" src="%ATTACHURL%/KEK53-9_region2.png" /> | <img alt="KEK53-9_no0_region2.png" src="%ATTACHURL%/KEK53-9_no0_region2.png" /> |
|  3  |  &#x7121;  |  Large  | <img alt="KEK53-9_region3.png" src="%ATTACHURL%/KEK53-9_region3.png" /> | <img alt="KEK53-9_no0_region3.png" src="%ATTACHURL%/KEK53-9_no0_region3.png" /> |
|  4-1  | ^ |  STD  | <img alt="KEK53-9_region4-1.png" src="%ATTACHURL%/KEK53-9_region4-1.png" /> | <img alt="KEK53-9_no0_region4-1.png" src="%ATTACHURL%/KEK53-9_no0_region4-1.png" /> |
|  4-2  | ^ |  Small  | <img alt="KEK53-9_region4-2.png" src="%ATTACHURL%/KEK53-9_region4-2.png" /> | <img alt="KEK53-9_no0_region4-2.png" src="%ATTACHURL%/KEK53-9_no0_region4-2.png" /> |
---++ KEK53-10

*ch-pitch : 50×50um*

*BR&#x4E0B; !SiO2&#x819C; : %RED%thick%ENDCOLOR%*

*PolySi-Al&#x9593;&#x306E;SiO2&#x819C; : STD*

*Poly-Si&#x62B5;&#x6297; : 10k&Omega;/&#x25A1;*
|  *Region*  |  *Poly-Si*  |  *N+ size*  |  *plot*  ||
|  1  |  &#x6709;  |  Large  | | |
|  2  | ^ |  STD  | | |
|  3  |  &#x7121;  |  Large  | | |
|  4  | ^ |  STD  | | |
---++ KEK53-11

*ch-pitch : 50×50um*

*BR&#x4E0B; !SiO2&#x819C; : %RED%thick%ENDCOLOR%*

*PolySi-Al&#x9593;&#x306E;SiO2&#x819C; : STD*

*Poly-Si&#x62B5;&#x6297; : 10k&Omega;/&#x25A1;*
|  *Region*  |  *Poly-Si*  |  *N+ size*  |  *plot*  ||
|  1  |  &#x6709;  |  Large  |  <img alt="KEK53-11_region1.png" src="%ATTACHURL%/KEK53-11_region1.png" />  |  <img alt="KEK53-11_no0_region1.png" src="%ATTACHURL%/KEK53-11_no0_region1.png" />  |
|  2  | ^ |  STD  |  <img alt="KEK53-11_region2.png" src="%ATTACHURL%/KEK53-11_region2.png" />  |  <img alt="KEK53-11_no0_region2.png" src="%ATTACHURL%/KEK53-11_no0_region2.png" />  |
|  3  |  &#x7121;  |  Large  |  <img alt="KEK53-11_region3.png" src="%ATTACHURL%/KEK53-11_region3.png" />  |  <img alt="KEK53-11_no0_region3.png" src="%ATTACHURL%/KEK53-11_no0_region3.png" />  |
|  4  | ^ |  STD  |  <img alt="KEK53-11_region4.png" src="%ATTACHURL%/KEK53-11_region4.png" />  |  <img alt="KEK53-11_no0_region4.png" src="%ATTACHURL%/KEK53-11_no0_region4.png" />  |
---++ KEK53-12

*ch-pitch : 50×50um*

*BR&#x4E0B; !SiO2&#x819C; : STD*

*PolySi-Al&#x9593;&#x306E;SiO2&#x819C; : STD*

*Poly-Si&#x62B5;&#x6297; : %RED%3k&Omega;/&#x25A1;%ENDCOLOR%*
|  *Region*  |  *Poly-Si*  |  *N+ size*  |  *plot*  ||
|  1  |  &#x6709;  |  Large  |  <img alt="KEK53-12_region1.png" src="%ATTACHURL%/KEK53-12_region1.png" />  |  <img alt="KEK53-12_no0_region1.png" src="%ATTACHURL%/KEK53-12_no0_region1.png" />  |
|  2  | ^ |  STD  |  <img alt="KEK53-12_region2.png" src="%ATTACHURL%/KEK53-12_region2.png" />  |  <img alt="KEK53-12_no0_region2.png" src="%ATTACHURL%/KEK53-12_no0_region2.png" />  |
|  3  |  &#x7121;  |  Large  |  <img alt="KEK53-12_region3.png" src="%ATTACHURL%/KEK53-12_region3.png" />  |  <img alt="KEK53-12_no0_region3.png" src="%ATTACHURL%/KEK53-12_no0_region3.png" />  |
|  4  | ^ |  STD  |  <img alt="KEK53-12_region4.png" src="%ATTACHURL%/KEK53-12_region4.png" />  |  <img alt="KEK53-12_no0_region4.png" src="%ATTACHURL%/KEK53-12_no0_region4.png" />  |
---++ KEK53-13

*ch-pitch : 50×50um*

*BR&#x4E0B; !SiO2&#x819C; : STD*

*PolySi-Al&#x9593;&#x306E;SiO2&#x819C; : STD*

*Poly-Si&#x62B5;&#x6297; : %RED%30k&Omega;/&#x25A1;%ENDCOLOR%*

|  *Region*  |  *Poly-Si*  |  *N+ size*  |  *plot*  ||
|  1  |  &#x6709;  |  Large  |  <img alt="KEK53-13_region1.png" src="%ATTACHURL%/KEK53-13_region1.png" />  |  <img alt="KEK53-13_no0_region1.png" src="%ATTACHURL%/KEK53-13_no0_region1.png" />  |
|  2  | ^ |  STD  |  <img alt="KEK53-13_region2.png" src="%ATTACHURL%/KEK53-13_region2.png" />  |  <img alt="KEK53-13_no0_region2.png" src="%ATTACHURL%/KEK53-13_no0_region2.png" />  |
|  3  |  &#x7121;  |  Large  |  <img alt="KEK53-13_region3.png" src="%ATTACHURL%/KEK53-13_region3.png" />  |  <img alt="KEK53-13_no0_region3.png" src="%ATTACHURL%/KEK53-13_no0_region3.png" />  |
|  4  | ^ |  STD  |  <img alt="KEK53-13_region4.png" src="%ATTACHURL%/KEK53-13_region4.png" />  |  <img alt="KEK53-13_no0_region4.png" src="%ATTACHURL%/KEK53-13_no0_region4.png" />  |
-- %USERSIG{AtlasjSilicon - 2018-07-06}%

---++ Comments

%COMMENT%

Attachments

Topic attachments
I	Attachment	History	Action	Size	Date	Who
png	KEK53-11_no0_region1.png	r1	manage	25.7 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_no0_region2.png	r1	manage	25.8 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_no0_region3.png	r1	manage	22.6 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_no0_region4.png	r1	manage	22.4 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_region1.png	r1	manage	26.8 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_region2.png	r1	manage	26.3 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_region3.png	r1	manage	22.1 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_region4.png	r1	manage	22.3 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-12_no0_region1.png	r1	manage	25.4 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_no0_region2.png	r1	manage	25.3 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_no0_region3.png	r1	manage	22.0 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_no0_region4.png	r1	manage	21.6 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_region1.png	r1	manage	27.4 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_region2.png	r1	manage	26.6 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_region3.png	r1	manage	22.2 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_region4.png	r1	manage	21.8 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-13_no0_region1.png	r1	manage	24.5 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_no0_region2.png	r1	manage	24.7 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_no0_region3.png	r1	manage	22.4 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_no0_region4.png	r1	manage	22.3 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_region1.png	r1	manage	23.1 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_region2.png	r1	manage	25.1 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_region3.png	r1	manage	22.7 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_region4.png	r1	manage	23.1 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-4_no0_region1.png	r1	manage	27.3 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_no0_region2.png	r1	manage	25.0 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_no0_region3.png	r1	manage	22.7 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_no0_region4.png	r1	manage	22.8 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_region1.png	r1	manage	26.0 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_region2.png	r1	manage	24.1 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_region3.png	r1	manage	22.9 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_region4.png	r1	manage	22.5 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-6_no0_region1.png	r1	manage	32.5 K	2018-07-06 - 14:25	AtlasjSilicon
png	KEK53-6_no0_region2.png	r1	manage	32.4 K	2018-07-06 - 14:24	AtlasjSilicon
png	KEK53-6_no0_region3.png	r1	manage	30.9 K	2018-07-06 - 14:24	AtlasjSilicon
png	KEK53-6_no0_region4-1.png	r1	manage	31.9 K	2018-07-06 - 14:24	AtlasjSilicon
png	KEK53-6_no0_region4-2.png	r1	manage	31.4 K	2018-07-06 - 14:24	AtlasjSilicon
png	KEK53-6_region1.png	r1	manage	37.5 K	2018-07-06 - 14:24	AtlasjSilicon
png	KEK53-6_region2.png	r1	manage	36.6 K	2018-07-06 - 14:24	AtlasjSilicon
png	KEK53-6_region3.png	r1	manage	31.7 K	2018-07-06 - 14:24	AtlasjSilicon
png	KEK53-6_region4-1.png	r1	manage	32.0 K	2018-07-06 - 14:24	AtlasjSilicon
png	KEK53-6_region4-2.png	r1	manage	32.9 K	2018-07-06 - 14:24	AtlasjSilicon
png	KEK53-7_no0_region1.png	r1	manage	24.8 K	2018-07-06 - 16:47	AtlasjSilicon
png	KEK53-7_no0_region2.png	r1	manage	24.7 K	2018-07-06 - 16:47	AtlasjSilicon
png	KEK53-7_no0_region3.png	r1	manage	22.1 K	2018-07-06 - 16:47	AtlasjSilicon
png	KEK53-7_no0_region4.png	r1	manage	22.7 K	2018-07-06 - 16:47	AtlasjSilicon
png	KEK53-7_region1.png	r1	manage	24.7 K	2018-07-06 - 16:47	AtlasjSilicon
png	KEK53-7_region2.png	r1	manage	27.2 K	2018-07-06 - 16:47	AtlasjSilicon
png	KEK53-7_region3.png	r1	manage	23.3 K	2018-07-06 - 16:47	AtlasjSilicon
png	KEK53-7_region4.png	r1	manage	23.2 K	2018-07-06 - 16:47	AtlasjSilicon
png	KEK53-9_no0_region1.png	r1	manage	35.8 K	2018-07-06 - 14:40	AtlasjSilicon
png	KEK53-9_no0_region2.png	r1	manage	34.5 K	2018-07-06 - 14:40	AtlasjSilicon
png	KEK53-9_no0_region3.png	r1	manage	31.5 K	2018-07-06 - 14:40	AtlasjSilicon
png	KEK53-9_no0_region4-1.png	r1	manage	32.2 K	2018-07-06 - 14:40	AtlasjSilicon
png	KEK53-9_no0_region4-2.png	r1	manage	31.8 K	2018-07-06 - 14:40	AtlasjSilicon
png	KEK53-9_region1.png	r1	manage	39.1 K	2018-07-06 - 14:40	AtlasjSilicon
png	KEK53-9_region2.png	r1	manage	38.7 K	2018-07-06 - 14:40	AtlasjSilicon
png	KEK53-9_region3.png	r1	manage	32.5 K	2018-07-06 - 14:40	AtlasjSilicon
png	KEK53-9_region4-1.png	r1	manage	32.4 K	2018-07-06 - 14:40	AtlasjSilicon
png	KEK53-9_region4-2.png	r1	manage	33.1 K	2018-07-06 - 14:40	AtlasjSilicon

Topic revision: r4 - 2018-07-06 - AtlasjSilicon