Difference: RD53AtestingatCERN (1 vs. 4)

Revision 42018-07-06 - AtlasjSilicon

Line: 1 to 1

META TOPICPARENT	name="July2018CERNTBlog"

RD53A testing@CERN

Line: 56 to 56

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size	plot

Changed:

<
<

1	有	Large
2	有	STD
3	無	Large
4	無	STD

>
>

1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-8

ch-pitch : 25×100um

Line: 204 to 204

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Added:

>
>

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META FILEATTACHMENT	attachment="KEK53-7_region4.png" attr="" comment="" date="1530895652" name="KEK53-7_region4.png" path="KEK53-7_region4.png" size="23722" user="AtlasjSilicon" version="1"

Revision 32018-07-06 - AtlasjSilicon

Line: 1 to 1

META TOPICPARENT	name="July2018CERNTBlog"

RD53A testing@CERN

Line: 6 to 6

KEK53-4

ch-pitch : 50×50um

Changed:

<
<

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

>
>

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-5

ch-pitch : 50×50um

Changed:

<
<

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

>
>

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-6

ch-pitch : 50×50um

Changed:

<
<

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4-1	無		STD
		4-2	無		Small

>
>

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4-1		STD
4-2		Small

KEK53-7

Changed:

<
<

ch-pitch : 25×100um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

>
>

ch-pitch : 25×100um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-8

Changed:

<
<

ch-pitch : 25×100um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

>
>

ch-pitch : 25×100um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-9

ch-pitch : 50×50um

Changed:

<
<

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	thick	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4-1	無		STD
		4-2	無		Small

>
>

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : thick

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4-1		STD
4-2		Small

KEK53-10

ch-pitch : 50×50um

Changed:

<
<

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
thick	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

>
>

BR下 SiO2膜 : thick

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-11

ch-pitch : 50×50um

Changed:

<
<

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
thick	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

>
>

BR下 SiO2膜 : thick

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-12

ch-pitch : 50×50um

Changed:

<
<

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	3kΩ/□	Large
		2	有	3kΩ/□	STD
		3	無		Large
		4	無		STD

>
>

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 3kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-13

ch-pitch : 50×50um

Changed:

<
<

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	30kΩ/□	Large
		2	有	30kΩ/□	STD
		3	無		Large
		4	無		STD

>
>

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 30kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

Atlasj Silicon - 2018-07-06

Comments

Line: 124 to 184

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Added:

>
>

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Revision 22018-07-06 - AtlasjSilicon

Line: 1 to 1

META TOPICPARENT	name="July2018CERNTBlog"

RD53A testing@CERN

RD53A testing@CERN
- KEK53-4
- KEK53-5
- KEK53-6
- KEK53-7
- KEK53-8
- KEK53-9
- KEK53-10
- KEK53-11
- KEK53-12
- KEK53-13
- Comments

KEK53-4

Added:

>
>

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-5

Added:

>
>

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-6

Added:

>
>

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size	plot
STD	STD	1	有	10kΩ/□	Large
STD	STD	2	有	10kΩ/□	STD

Line: 23 to 29

4-1	無	STD
4-2	無	Small

KEK53-7

Added:

>
>

ch-pitch : 25×100um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-8

Added:

>
>

ch-pitch : 25×100um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-9

Added:

>
>

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	thick	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4-1	無		STD
		4-2	無		Small

KEK53-10

Added:

>
>

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
thick	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-11

Added:

>
>

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
thick	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-12

Added:

>
>

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	3kΩ/□	Large
		2	有	3kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-13

Added:

>
>

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	30kΩ/□	Large
		2	有	30kΩ/□	STD
		3	無		Large
		4	無		STD

Atlasj Silicon - 2018-07-06

Comments

Line: 52 to 108

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Added:

>
>

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Revision 12018-07-06 - AtlasjSilicon

Line: 1 to 1

Added:

>
>

META TOPICPARENT	name="July2018CERNTBlog"

RD53A testing@CERN

RD53A testing@CERN
- KEK53-4
- KEK53-5
- KEK53-6
- KEK53-7
- KEK53-8
- KEK53-9
- KEK53-10
- KEK53-11
- KEK53-12
- KEK53-13
- Comments

KEK53-4

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-5

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-6

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4-1	無		STD
		4-2	無		Small

KEK53-7

KEK53-8

KEK53-9

KEK53-10

KEK53-11

KEK53-12

KEK53-13

-- Atlasj Silicon - 2018-07-06

Comments

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