Difference: RD53AtestingatCERN (2 vs. 3)

Revision 32018-07-06 - AtlasjSilicon

Line: 1 to 1
 
META TOPICPARENT name="July2018CERNTBlog"

RD53A testing@CERN

Line: 6 to 6
 

KEK53-4

ch-pitch : 5050um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 10kΩ/□ Large KEK53-4_region1.png KEK53-4_no0_region1.png
2 STD KEK53-4_region2.png KEK53-4_no0_region2.png
3   Large KEK53-4_region3.png KEK53-4_no0_region3.png
4 STD KEK53-4_region4.png KEK53-4_no0_region4.png
>
>
BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 Large KEK53-4_region1.png KEK53-4_no0_region1.png
2 STD KEK53-4_region2.png KEK53-4_no0_region2.png
3 Large KEK53-4_region3.png KEK53-4_no0_region3.png
4 STD KEK53-4_region4.png KEK53-4_no0_region4.png
 

KEK53-5

ch-pitch : 5050um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 10kΩ/□ Large    
2 STD    
3   Large    
4 STD    
>
>
BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 Large    
2 STD    
3 Large    
4 STD    
 

KEK53-6

ch-pitch : 5050um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 10kΩ/□ Large    
2 STD    
3   Large    
4-1 STD    
4-2 Small    
>
>
BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 Large KEK53-6_region1.png KEK53-6_no0_region1.png
2 STD KEK53-6_region2.png KEK53-6_no0_region2.png
3 Large KEK53-6_region3.png KEK53-6_no0_region3.png
4-1 STD KEK53-6_region4-1.png KEK53-6_no0_region4-1.png
4-2 Small KEK53-6_region4-2.png KEK53-6_no0_region4-2.png
 

KEK53-7

Changed:
<
<
ch-pitch : 25100um
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 10kΩ/□ Large    
2 STD    
3   Large    
4 STD    
>
>
ch-pitch : 25100um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 Large    
2 STD    
3 Large    
4 STD    
 

KEK53-8

Changed:
<
<
ch-pitch : 25100um
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 10kΩ/□ Large    
2 STD    
3   Large    
4 STD    
>
>
ch-pitch : 25100um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 Large    
2 STD    
3 Large    
4 STD    
 

KEK53-9

ch-pitch : 5050um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD thick 1 10kΩ/□ Large    
2 STD    
3   Large    
4-1 STD    
4-2 Small    
>
>
BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : thick

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 Large KEK53-9_region1.png KEK53-9_no0_region1.png
2 STD KEK53-9_region2.png KEK53-9_no0_region2.png
3 Large KEK53-9_region3.png KEK53-9_no0_region3.png
4-1 STD KEK53-9_region4-1.png KEK53-9_no0_region4-1.png
4-2 Small KEK53-9_region4-2.png KEK53-9_no0_region4-2.png
 

KEK53-10

ch-pitch : 5050um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
thick STD 1 10kΩ/□ Large    
2 STD    
3   Large    
4 STD    
>
>
BR下 SiO2膜 : thick

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 Large    
2 STD    
3 Large    
4 STD    
 

KEK53-11

ch-pitch : 5050um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
thick STD 1 10kΩ/□ Large KEK53-11_region1.png KEK53-11_no0_region1.png
2 STD KEK53-11_region2.png KEK53-11_no0_region2.png
3   Large KEK53-11_region3.png KEK53-11_no0_region3.png
4 STD KEK53-11_region4.png KEK53-11_no0_region4.png
>
>
BR下 SiO2膜 : thick

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 Large KEK53-11_region1.png KEK53-11_no0_region1.png
2 STD KEK53-11_region2.png KEK53-11_no0_region2.png
3 Large KEK53-11_region3.png KEK53-11_no0_region3.png
4 STD KEK53-11_region4.png KEK53-11_no0_region4.png
 

KEK53-12

ch-pitch : 5050um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 3kΩ/□ Large KEK53-12_region1.png KEK53-12_no0_region1.png
2 STD KEK53-12_region2.png KEK53-12_no0_region2.png
3   Large KEK53-12_region3.png KEK53-12_no0_region3.png
4 STD KEK53-12_region4.png KEK53-12_no0_region4.png
>
>
BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 3kΩ/□

Region Poly-Si N+ size plot
1 Large KEK53-12_region1.png KEK53-12_no0_region1.png
2 STD KEK53-12_region2.png KEK53-12_no0_region2.png
3 Large KEK53-12_region3.png KEK53-12_no0_region3.png
4 STD KEK53-12_region4.png KEK53-12_no0_region4.png
 

KEK53-13

ch-pitch : 5050um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 30kΩ/□ Large KEK53-13_region1.png KEK53-13_no0_region1.png
2 STD KEK53-13_region2.png KEK53-13_no0_region2.png
3   Large KEK53-13_region3.png KEK53-13_no0_region3.png
4 STD KEK53-13_region4.png KEK53-13_no0_region4.png
>
>
BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 30kΩ/□

Region Poly-Si N+ size plot
1 Large KEK53-13_region1.png KEK53-13_no0_region1.png
2 STD KEK53-13_region2.png KEK53-13_no0_region2.png
3 Large KEK53-13_region3.png KEK53-13_no0_region3.png
4 STD KEK53-13_region4.png KEK53-13_no0_region4.png
 -- Atlasj Silicon - 2018-07-06

Comments

Line: 124 to 184
 
META FILEATTACHMENT attachment="KEK53-13_region2.png" attr="" comment="" date="1530879222" name="KEK53-13_region2.png" path="KEK53-13_region2.png" size="25714" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-13_region3.png" attr="" comment="" date="1530879222" name="KEK53-13_region3.png" path="KEK53-13_region3.png" size="23275" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-13_region4.png" attr="" comment="" date="1530879221" name="KEK53-13_region4.png" path="KEK53-13_region4.png" size="23635" user="AtlasjSilicon" version="1"
Added:
>
>
META FILEATTACHMENT attachment="KEK53-6_no0_region2.png" attr="" comment="" date="1530887074" name="KEK53-6_no0_region2.png" path="KEK53-6_no0_region2.png" size="33157" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-6_no0_region3.png" attr="" comment="" date="1530887074" name="KEK53-6_no0_region3.png" path="KEK53-6_no0_region3.png" size="31663" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-6_no0_region4-1.png" attr="" comment="" date="1530887074" name="KEK53-6_no0_region4-1.png" path="KEK53-6_no0_region4-1.png" size="32708" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-6_no0_region4-2.png" attr="" comment="" date="1530887074" name="KEK53-6_no0_region4-2.png" path="KEK53-6_no0_region4-2.png" size="32202" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-6_region1.png" attr="" comment="" date="1530887074" name="KEK53-6_region1.png" path="KEK53-6_region1.png" size="38381" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-6_region2.png" attr="" comment="" date="1530887074" name="KEK53-6_region2.png" path="KEK53-6_region2.png" size="37458" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-6_region3.png" attr="" comment="" date="1530887074" name="KEK53-6_region3.png" path="KEK53-6_region3.png" size="32417" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-6_region4-1.png" attr="" comment="" date="1530887073" name="KEK53-6_region4-1.png" path="KEK53-6_region4-1.png" size="32773" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-6_region4-2.png" attr="" comment="" date="1530887073" name="KEK53-6_region4-2.png" path="KEK53-6_region4-2.png" size="33704" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-6_no0_region1.png" attr="" comment="" date="1530887141" name="KEK53-6_no0_region1.png" path="KEK53-6_no0_region1.png" size="33242" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-9_no0_region1.png" attr="" comment="" date="1530888014" name="KEK53-9_no0_region1.png" path="KEK53-9_no0_region1.png" size="36673" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-9_no0_region2.png" attr="" comment="" date="1530888014" name="KEK53-9_no0_region2.png" path="KEK53-9_no0_region2.png" size="35378" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-9_no0_region3.png" attr="" comment="" date="1530888014" name="KEK53-9_no0_region3.png" path="KEK53-9_no0_region3.png" size="32215" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-9_no0_region4-1.png" attr="" comment="" date="1530888014" name="KEK53-9_no0_region4-1.png" path="KEK53-9_no0_region4-1.png" size="32934" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-9_no0_region4-2.png" attr="" comment="" date="1530888014" name="KEK53-9_no0_region4-2.png" path="KEK53-9_no0_region4-2.png" size="32557" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-9_region1.png" attr="" comment="" date="1530888013" name="KEK53-9_region1.png" path="KEK53-9_region1.png" size="40074" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-9_region2.png" attr="" comment="" date="1530888013" name="KEK53-9_region2.png" path="KEK53-9_region2.png" size="39585" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-9_region3.png" attr="" comment="" date="1530888013" name="KEK53-9_region3.png" path="KEK53-9_region3.png" size="33290" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-9_region4-1.png" attr="" comment="" date="1530888013" name="KEK53-9_region4-1.png" path="KEK53-9_region4-1.png" size="33191" user="AtlasjSilicon" version="1"
META FILEATTACHMENT attachment="KEK53-9_region4-2.png" attr="" comment="" date="1530888013" name="KEK53-9_region4-2.png" path="KEK53-9_region4-2.png" size="33859" user="AtlasjSilicon" version="1"
 
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