Difference: RD53AtestingatCERN (2 vs. 3)

Revision 32018-07-06 - AtlasjSilicon

Line: 1 to 1
 
META TOPICPARENT name="July2018CERNTBlog"

RD53A testing@CERN

Line: 6 to 6
 

KEK53-4

ch-pitch : 50×50um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 有 10kΩ/□ Large KEK53-4_region1.png KEK53-4_no0_region1.png
2 有 STD KEK53-4_region2.png KEK53-4_no0_region2.png
3 無   Large KEK53-4_region3.png KEK53-4_no0_region3.png
4 無 STD KEK53-4_region4.png KEK53-4_no0_region4.png
>
>		 BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-4_region1.png KEK53-4_no0_region1.png
2 STD KEK53-4_region2.png KEK53-4_no0_region2.png
3 無 Large KEK53-4_region3.png KEK53-4_no0_region3.png
4 STD KEK53-4_region4.png KEK53-4_no0_region4.png
 

KEK53-5

ch-pitch : 50×50um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 有 10kΩ/□ Large    
2 有 STD    
3 無   Large    
4 無 STD    
>
>		 BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large    
2 STD    
3 無 Large    
4 STD    
 

KEK53-6

ch-pitch : 50×50um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 有 10kΩ/□ Large    
2 有 STD    
3 無   Large    
4-1 無 STD    
4-2 無 Small    
>
>		 BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-6_region1.png KEK53-6_no0_region1.png
2 STD KEK53-6_region2.png KEK53-6_no0_region2.png
3 無 Large KEK53-6_region3.png KEK53-6_no0_region3.png
4-1 STD KEK53-6_region4-1.png KEK53-6_no0_region4-1.png
4-2 Small KEK53-6_region4-2.png KEK53-6_no0_region4-2.png
 

KEK53-7

Changed:
<
<		ch-pitch : 25×100um
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 有 10kΩ/□ Large    
2 有 STD    
3 無   Large    
4 無 STD    
>
>		ch-pitch : 25×100um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large    
2 STD    
3 無 Large    
4 STD    
 

KEK53-8

Changed:
<
<		ch-pitch : 25×100um
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 有 10kΩ/□ Large    
2 有 STD    
3 無   Large    
4 無 STD    
>
>		ch-pitch : 25×100um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large    
2 STD    
3 無 Large    
4 STD    
 

KEK53-9

ch-pitch : 50×50um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD thick 1 有 10kΩ/□ Large    
2 有 STD    
3 無   Large    
4-1 無 STD    
4-2 無 Small    
>
>		 BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : thick

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-9_region1.png KEK53-9_no0_region1.png
2 STD KEK53-9_region2.png KEK53-9_no0_region2.png
3 無 Large KEK53-9_region3.png KEK53-9_no0_region3.png
4-1 STD KEK53-9_region4-1.png KEK53-9_no0_region4-1.png
4-2 Small KEK53-9_region4-2.png KEK53-9_no0_region4-2.png
 

KEK53-10

ch-pitch : 50×50um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
thick STD 1 有 10kΩ/□ Large    
2 有 STD    
3 無   Large    
4 無 STD    
>
>		 BR下 SiO2膜 : thick

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large    
2 STD    
3 無 Large    
4 STD    
 

KEK53-11

ch-pitch : 50×50um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
thick STD 1 有 10kΩ/□ Large KEK53-11_region1.png KEK53-11_no0_region1.png
2 有 STD KEK53-11_region2.png KEK53-11_no0_region2.png
3 無   Large KEK53-11_region3.png KEK53-11_no0_region3.png
4 無 STD KEK53-11_region4.png KEK53-11_no0_region4.png
>
>		 BR下 SiO2膜 : thick

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-11_region1.png KEK53-11_no0_region1.png
2 STD KEK53-11_region2.png KEK53-11_no0_region2.png
3 無 Large KEK53-11_region3.png KEK53-11_no0_region3.png
4 STD KEK53-11_region4.png KEK53-11_no0_region4.png
 

KEK53-12

ch-pitch : 50×50um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 有 3kΩ/□ Large KEK53-12_region1.png KEK53-12_no0_region1.png
2 有 STD KEK53-12_region2.png KEK53-12_no0_region2.png
3 無   Large KEK53-12_region3.png KEK53-12_no0_region3.png
4 無 STD KEK53-12_region4.png KEK53-12_no0_region4.png
>
>		 BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 3kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-12_region1.png KEK53-12_no0_region1.png
2 STD KEK53-12_region2.png KEK53-12_no0_region2.png
3 無 Large KEK53-12_region3.png KEK53-12_no0_region3.png
4 STD KEK53-12_region4.png KEK53-12_no0_region4.png
 

KEK53-13

ch-pitch : 50×50um

Changed:
<
<
BR下 SiO2膜 PolySi-Al間のSiO2膜 Region Poly-Si N+ size plot
STD STD 1 有 30kΩ/□ Large KEK53-13_region1.png KEK53-13_no0_region1.png
2 有 STD KEK53-13_region2.png KEK53-13_no0_region2.png
3 無   Large KEK53-13_region3.png KEK53-13_no0_region3.png
4 無 STD KEK53-13_region4.png KEK53-13_no0_region4.png
>
>		BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 30kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-13_region1.png KEK53-13_no0_region1.png
2 STD KEK53-13_region2.png KEK53-13_no0_region2.png
3 無 Large KEK53-13_region3.png KEK53-13_no0_region3.png
4 STD KEK53-13_region4.png KEK53-13_no0_region4.png
 -- Atlasj Silicon - 2018-07-06

Comments

Line: 124 to 184
 
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Added:
>
>
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