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RD53A testing@CERN

KEK53-4

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-4_region1.png KEK53-4_no0_region1.png
2 STD KEK53-4_region2.png KEK53-4_no0_region2.png
3 無 Large KEK53-4_region3.png KEK53-4_no0_region3.png
4 STD KEK53-4_region4.png KEK53-4_no0_region4.png

KEK53-5

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large    
2 STD    
3 無 Large    
4 STD    

KEK53-6

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-6_region1.png KEK53-6_no0_region1.png
2 STD KEK53-6_region2.png KEK53-6_no0_region2.png
3 無 Large KEK53-6_region3.png KEK53-6_no0_region3.png
4-1 STD KEK53-6_region4-1.png KEK53-6_no0_region4-1.png
4-2 Small KEK53-6_region4-2.png KEK53-6_no0_region4-2.png

KEK53-7

ch-pitch : 25×100um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-7_region1.png KEK53-7_no0_region1.png
2 STD KEK53-7_region2.png KEK53-7_no0_region2.png
3 無 Large KEK53-7_region3.png KEK53-7_no0_region3.png
4 STD KEK53-7_region4.png KEK53-7_no0_region4.png

KEK53-8

ch-pitch : 25×100um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large    
2 STD    
3 無 Large    
4 STD    

KEK53-9

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : thick

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-9_region1.png KEK53-9_no0_region1.png
2 STD KEK53-9_region2.png KEK53-9_no0_region2.png
3 無 Large KEK53-9_region3.png KEK53-9_no0_region3.png
4-1 STD KEK53-9_region4-1.png KEK53-9_no0_region4-1.png
4-2 Small KEK53-9_region4-2.png KEK53-9_no0_region4-2.png

KEK53-10

ch-pitch : 50×50um

BR下 SiO2膜 : thick

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large    
2 STD    
3 無 Large    
4 STD    

KEK53-11

ch-pitch : 50×50um

BR下 SiO2膜 : thick

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-11_region1.png KEK53-11_no0_region1.png
2 STD KEK53-11_region2.png KEK53-11_no0_region2.png
3 無 Large KEK53-11_region3.png KEK53-11_no0_region3.png
4 STD KEK53-11_region4.png KEK53-11_no0_region4.png

KEK53-12

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 3kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-12_region1.png KEK53-12_no0_region1.png
2 STD KEK53-12_region2.png KEK53-12_no0_region2.png
3 無 Large KEK53-12_region3.png KEK53-12_no0_region3.png
4 STD KEK53-12_region4.png KEK53-12_no0_region4.png

KEK53-13

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 30kΩ/□

Region Poly-Si N+ size plot
1 有 Large KEK53-13_region1.png KEK53-13_no0_region1.png
2 STD KEK53-13_region2.png KEK53-13_no0_region2.png
3 無 Large KEK53-13_region3.png KEK53-13_no0_region3.png
4 STD KEK53-13_region4.png KEK53-13_no0_region4.png
-- Atlasj Silicon - 2018-07-06

Comments

Attachments Attachments
Topic attachments
I Attachment History Action Size Date Who Comment
PNGpng KEK53-11_no0_region1.png r1 manage 25.7 K 2018-07-06 - 10:27 AtlasjSilicon  
PNGpng KEK53-11_no0_region2.png r1 manage 25.8 K 2018-07-06 - 10:27 AtlasjSilicon  
PNGpng KEK53-11_no0_region3.png r1 manage 22.6 K 2018-07-06 - 10:27 AtlasjSilicon  
PNGpng KEK53-11_no0_region4.png r1 manage 22.4 K 2018-07-06 - 10:27 AtlasjSilicon  
PNGpng KEK53-11_region1.png r1 manage 26.8 K 2018-07-06 - 10:27 AtlasjSilicon  
PNGpng KEK53-11_region2.png r1 manage 26.3 K 2018-07-06 - 10:27 AtlasjSilicon  
PNGpng KEK53-11_region3.png r1 manage 22.1 K 2018-07-06 - 10:27 AtlasjSilicon  
PNGpng KEK53-11_region4.png r1 manage 22.3 K 2018-07-06 - 10:27 AtlasjSilicon  
PNGpng KEK53-12_no0_region1.png r1 manage 25.4 K 2018-07-06 - 12:04 AtlasjSilicon  
PNGpng KEK53-12_no0_region2.png r1 manage 25.3 K 2018-07-06 - 12:04 AtlasjSilicon  
PNGpng KEK53-12_no0_region3.png r1 manage 22.0 K 2018-07-06 - 12:04 AtlasjSilicon  
PNGpng KEK53-12_no0_region4.png r1 manage 21.6 K 2018-07-06 - 12:04 AtlasjSilicon  
PNGpng KEK53-12_region1.png r1 manage 27.4 K 2018-07-06 - 12:04 AtlasjSilicon  
PNGpng KEK53-12_region2.png r1 manage 26.6 K 2018-07-06 - 12:04 AtlasjSilicon  
PNGpng KEK53-12_region3.png r1 manage 22.2 K 2018-07-06 - 12:04 AtlasjSilicon  
PNGpng KEK53-12_region4.png r1 manage 21.8 K 2018-07-06 - 12:04 AtlasjSilicon  
PNGpng KEK53-13_no0_region1.png r1 manage 24.5 K 2018-07-06 - 12:13 AtlasjSilicon  
PNGpng KEK53-13_no0_region2.png r1 manage 24.7 K 2018-07-06 - 12:13 AtlasjSilicon  
PNGpng KEK53-13_no0_region3.png r1 manage 22.4 K 2018-07-06 - 12:13 AtlasjSilicon  
PNGpng KEK53-13_no0_region4.png r1 manage 22.3 K 2018-07-06 - 12:13 AtlasjSilicon  
PNGpng KEK53-13_region1.png r1 manage 23.1 K 2018-07-06 - 12:13 AtlasjSilicon  
PNGpng KEK53-13_region2.png r1 manage 25.1 K 2018-07-06 - 12:13 AtlasjSilicon  
PNGpng KEK53-13_region3.png r1 manage 22.7 K 2018-07-06 - 12:13 AtlasjSilicon  
PNGpng KEK53-13_region4.png r1 manage 23.1 K 2018-07-06 - 12:13 AtlasjSilicon  
PNGpng KEK53-4_no0_region1.png r1 manage 27.3 K 2018-07-06 - 09:49 AtlasjSilicon  
PNGpng KEK53-4_no0_region2.png r1 manage 25.0 K 2018-07-06 - 09:49 AtlasjSilicon  
PNGpng KEK53-4_no0_region3.png r1 manage 22.7 K 2018-07-06 - 09:49 AtlasjSilicon  
PNGpng KEK53-4_no0_region4.png r1 manage 22.8 K 2018-07-06 - 09:49 AtlasjSilicon  
PNGpng KEK53-4_region1.png r1 manage 26.0 K 2018-07-06 - 09:49 AtlasjSilicon  
PNGpng KEK53-4_region2.png r1 manage 24.1 K 2018-07-06 - 09:49 AtlasjSilicon  
PNGpng KEK53-4_region3.png r1 manage 22.9 K 2018-07-06 - 09:49 AtlasjSilicon  
PNGpng KEK53-4_region4.png r1 manage 22.5 K 2018-07-06 - 09:49 AtlasjSilicon  
PNGpng KEK53-6_no0_region1.png r1 manage 32.5 K 2018-07-06 - 14:25 AtlasjSilicon  
PNGpng KEK53-6_no0_region2.png r1 manage 32.4 K 2018-07-06 - 14:24 AtlasjSilicon  
PNGpng KEK53-6_no0_region3.png r1 manage 30.9 K 2018-07-06 - 14:24 AtlasjSilicon  
PNGpng KEK53-6_no0_region4-1.png r1 manage 31.9 K 2018-07-06 - 14:24 AtlasjSilicon  
PNGpng KEK53-6_no0_region4-2.png r1 manage 31.4 K 2018-07-06 - 14:24 AtlasjSilicon  
PNGpng KEK53-6_region1.png r1 manage 37.5 K 2018-07-06 - 14:24 AtlasjSilicon  
PNGpng KEK53-6_region2.png r1 manage 36.6 K 2018-07-06 - 14:24 AtlasjSilicon  
PNGpng KEK53-6_region3.png r1 manage 31.7 K 2018-07-06 - 14:24 AtlasjSilicon  
PNGpng KEK53-6_region4-1.png r1 manage 32.0 K 2018-07-06 - 14:24 AtlasjSilicon  
PNGpng KEK53-6_region4-2.png r1 manage 32.9 K 2018-07-06 - 14:24 AtlasjSilicon  
PNGpng KEK53-7_no0_region1.png r1 manage 24.8 K 2018-07-06 - 16:47 AtlasjSilicon  
PNGpng KEK53-7_no0_region2.png r1 manage 24.7 K 2018-07-06 - 16:47 AtlasjSilicon  
PNGpng KEK53-7_no0_region3.png r1 manage 22.1 K 2018-07-06 - 16:47 AtlasjSilicon  
PNGpng KEK53-7_no0_region4.png r1 manage 22.7 K 2018-07-06 - 16:47 AtlasjSilicon  
PNGpng KEK53-7_region1.png r1 manage 24.7 K 2018-07-06 - 16:47 AtlasjSilicon  
PNGpng KEK53-7_region2.png r1 manage 27.2 K 2018-07-06 - 16:47 AtlasjSilicon  
PNGpng KEK53-7_region3.png r1 manage 23.3 K 2018-07-06 - 16:47 AtlasjSilicon  
PNGpng KEK53-7_region4.png r1 manage 23.2 K 2018-07-06 - 16:47 AtlasjSilicon  
PNGpng KEK53-9_no0_region1.png r1 manage 35.8 K 2018-07-06 - 14:40 AtlasjSilicon  
PNGpng KEK53-9_no0_region2.png r1 manage 34.5 K 2018-07-06 - 14:40 AtlasjSilicon  
PNGpng KEK53-9_no0_region3.png r1 manage 31.5 K 2018-07-06 - 14:40 AtlasjSilicon  
PNGpng KEK53-9_no0_region4-1.png r1 manage 32.2 K 2018-07-06 - 14:40 AtlasjSilicon  
PNGpng KEK53-9_no0_region4-2.png r1 manage 31.8 K 2018-07-06 - 14:40 AtlasjSilicon  
PNGpng KEK53-9_region1.png r1 manage 39.1 K 2018-07-06 - 14:40 AtlasjSilicon  
PNGpng KEK53-9_region2.png r1 manage 38.7 K 2018-07-06 - 14:40 AtlasjSilicon  
PNGpng KEK53-9_region3.png r1 manage 32.5 K 2018-07-06 - 14:40 AtlasjSilicon  
PNGpng KEK53-9_region4-1.png r1 manage 32.4 K 2018-07-06 - 14:40 AtlasjSilicon  
PNGpng KEK53-9_region4-2.png r1 manage 33.1 K 2018-07-06 - 14:40 AtlasjSilicon  
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Topic revision: r4 - 2018-07-06 - AtlasjSilicon
 
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