Difference: RD53AtestingatCERN (3 vs. 4)

Revision 42018-07-06 - AtlasjSilicon

META TOPICPARENT	name="July2018CERNTBlog"

RD53A testing@CERN

RD53A testing@CERN
- KEK53-4
- KEK53-5
- KEK53-6
- KEK53-7
- KEK53-8
- KEK53-9
- KEK53-10
- KEK53-11
- KEK53-12
- KEK53-13
- Comments

KEK53-4

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-5

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-6

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4-1		STD
4-2		Small

KEK53-7

ch-pitch : 25×100um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size	plot

Changed:

<
<

1	有	Large
2	有	STD
3	無	Large
4	無	STD

>
>

1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-8

ch-pitch : 25×100um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-9

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : thick

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4-1		STD
4-2		Small

KEK53-10

ch-pitch : 50×50um

BR下 SiO2膜 : thick

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-11

ch-pitch : 50×50um

BR下 SiO2膜 : thick

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 10kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-12

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 3kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

KEK53-13

ch-pitch : 50×50um

BR下 SiO2膜 : STD

PolySi-Al間のSiO2膜 : STD

Poly-Si抵抗 : 30kΩ/□

Region	Poly-Si	N+ size
1	有	Large
2	有	STD
3	無	Large
4	無	STD

Atlasj Silicon - 2018-07-06

Comments

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Added:

>
>

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