MOS capacitor Measurement

First Example Measurement

type1 (average)

Al-SiO2-Si(0-1) : 2.6pF (50kHz~10MHz)

Al-SiO2-p+(3-4) : 130pF (1kHz~1MHz)

Al-SiN-SiO2-Si(0-2) : 55pF (5kHz~100kHz)

ATLAS98 (現SCTのセンサー)のテストストラクチュア

-- Koji Nakamura - 2016-04-01

First measurement results

Slide from K.Sato is here

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Topic revision: r3 - 2016-07-28 - KojiNakamura
 
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