Difference: MOScapacitorMeasurement (1 vs. 4)

Revision 42016-10-11 - AtlasjSilicon

META TOPICPARENT	name="WebHome"

MOS capacitor Measurement

MOS capacitor Measurement
- First Example Measurement
  - ATLAS98 (現SCTのセンサー）のテストストラクチュア
  - First measurement results
- Comments

First Example Measurement

type1 (average)

Al-SiO2-Si(0-1) : 2.6pF (50kHz~10MHz)

Al-SiO2-p+(3-4) : 130pF (1kHz~1MHz)

Al-SiN-SiO2-Si(0-2) : 55pF (5kHz~100kHz)

ATLAS98 (現SCTのセンサー）のテストストラクチュア

図面 ( ATLAS98B_HPK2225938754991217.pdf)

-- Koji Nakamura - 2016-04-01

First measurement results

Slide from K.Sato is here

Comments

<--/commentPlugin-->

META FILEATTACHMENT	attachment="ATLAS98B_HPK2225938754991217.pdf" attr="" comment="" date="1459525753" name="ATLAS98B_HPK2225938754991217.pdf" path="ATLAS98B_HPK2225938754991217.pdf" size="5252894" user="KojiNakamura" version="1"

Added:

>
>

META FILEATTACHMENT	attachment="MOS.pdf" attr="" comment="" date="1476179670" name="MOS.pdf" path="MOS.pdf" size="2960751" user="AtlasjSilicon" version="1"

Revision 32016-07-28 - KojiNakamura

META TOPICPARENT	name="WebHome"

MOS capacitor Measurement

MOS capacitor Measurement
- First Example Measurement
  - ATLAS98 (現SCTのセンサー）のテストストラクチュア
  - First measurement results
- Comments

First Example Measurement

type1 (average)

Al-SiO2-Si(0-1) : 2.6pF (50kHz~10MHz)

Al-SiO2-p+(3-4) : 130pF (1kHz~1MHz)

Al-SiN-SiO2-Si(0-2) : 55pF (5kHz~100kHz)

ATLAS98 (現SCTのセンサー）のテストストラクチュア

図面 ( ATLAS98B_HPK2225938754991217.pdf)

-- Koji Nakamura - 2016-04-01

Added:

>
>

First measurement results

Added:

>
>

Slide from K.Sato is here

Comments

<--/commentPlugin-->

META FILEATTACHMENT	attachment="ATLAS98B_HPK2225938754991217.pdf" attr="" comment="" date="1459525753" name="ATLAS98B_HPK2225938754991217.pdf" path="ATLAS98B_HPK2225938754991217.pdf" size="5252894" user="KojiNakamura" version="1"

Revision 22016-04-12 - AtlasjSilicon

META TOPICPARENT	name="WebHome"

MOS capacitor Measurement

MOS capacitor Measurement
- First Example Measurement
  - ATLAS98 (現SCTのセンサー）のテストストラクチュア
  - First measurement results
- Comments

First Example Measurement

Added:

>
>

type1 (average)

Al-SiO2-Si(0-1) : 2.6pF (50kHz~10MHz)

Al-SiO2-p+(3-4) : 130pF (1kHz~1MHz)

Al-SiN-SiO2-Si(0-2) : 55pF (5kHz~100kHz)

ATLAS98 (現SCTのセンサー）のテストストラクチュア

図面 ( ATLAS98B_HPK2225938754991217.pdf)

-- Koji Nakamura - 2016-04-01

Comments

<--/commentPlugin-->

META FILEATTACHMENT	attachment="ATLAS98B_HPK2225938754991217.pdf" attr="" comment="" date="1459525753" name="ATLAS98B_HPK2225938754991217.pdf" path="ATLAS98B_HPK2225938754991217.pdf" size="5252894" user="KojiNakamura" version="1"

Revision 12016-04-01 - KojiNakamura

META TOPICPARENT	name="WebHome"

MOS capacitor Measurement

MOS capacitor Measurement
- First Example Measurement
  - ATLAS98 (現SCTのセンサー）のテストストラクチュア
  - First measurement results
- Comments

First Example Measurement

ATLAS98 (現SCTのセンサー）のテストストラクチュア

図面 ( ATLAS98B_HPK2225938754991217.pdf)

-- Koji Nakamura - 2016-04-01

Comments

<--/commentPlugin-->

META FILEATTACHMENT	attachment="ATLAS98B_HPK2225938754991217.pdf" attr="" comment="" date="1459525753" name="ATLAS98B_HPK2225938754991217.pdf" path="ATLAS98B_HPK2225938754991217.pdf" size="5252894" user="KojiNakamura" version="1"

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