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---+ 3D&#x30C7;&#x30D0;&#x30A4;&#x30B9;&#x30A8;&#x30C7;&#x30A3;&#x30BF;&#x3068;&#x30D7;&#x30ED;&#x30BB;&#x30B9;&#x30A8;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;

%TOC%
---++ &#x30D7;&#x30ED;&#x30B8;&#x30A7;&#x30AF;&#x30C8;&#x306E;&#x30B3;&#x30D4;&#x30FC;

&#x5C0F;&#x6280;&#x306A;&#x3069;&#x306E;&#x3000; [[TCADOtherMemos#x7_E2E][&#x5727;&#x7E2E;&#x6E08;&#x307F;&#x306E;&#x30D7;&#x30ED;&#x30B8;&#x30A7;&#x30AF;&#x30C8;&#x3092;&#x8AAD;&#x307F;&#x8FBC;&#x3080;&#x65B9;&#x6CD5;]] &#x3067;&#x8AAD;&#x307F;&#x8FBC;&#x3093;&#x3060;&#x30D7;&#x30ED;&#x30B8;&#x30A7;&#x30AF;&#x30C8;&#x3092;&#x4F7F;&#x3044;&#x307E;&#x3059;&#x3002; [[TCADOtherMemos#x7_E2E][<br />]]

&#x3068;&#x308A;&#x3042;&#x3048;&#x305A; node 1 &#x3092;&#x8D70;&#x3089;&#x305B;&#x3066;&#x898B;&#x3066;&#x304F;&#x3060;&#x3055;&#x3044;&#x3002;

(&#x6642;&#x3005;sde&#x3092;batch mode&#x3067;&#x4F5C;&#x3063;&#x3066;&#x3082;Sentaurus Structure Editor&#x306E;GUI&#x304C;&#x7ACB;&#x3061;&#x4E0A;&#x304C;&#x308B;&#x3053;&#x3068;&#x304C;&#x3042;&#x308B;&#x306E;&#x3067;&#x305D;&#x306E;&#x6642;&#x306F;&#x6D88;&#x3057;&#x3066;&#x304F;&#x3060;&#x3055;&#x3044;&#x3002;&#x30D7;&#x30ED;&#x30B8;&#x30A7;&#x30AF;&#x30C8;&#x304C;&#x6B7B;&#x306C;&#x306E;&#x3067;&#x3001;SDE&#x3092;&#x53F3;&#x30AF;&#x30EA;&#x30C3;&#x30AF;proparty &#x304B;&#x3089;batch&#x304C;&#x9078;&#x629E;&#x3055;&#x308C;&#x3066;&#x3044;&#x308B;&#x3053;&#x3068;&#x3092;&#x78BA;&#x8A8D;&#x3057;&#x3066; Apply -&gt; OK &#x3002;&#x518D;&#x5EA6;&#x8D70;&#x3089;&#x305B;&#x308B;&#x3002;)

---++ Pixel3D _dvs.cmd&#x306E;&#x89E3;&#x8AAC;

&#x307E;&#x305A;&#x306F;&#x9577;&#x3055;&#x3084;&#x539A;&#x307F;&#x7B49;&#x306E;&#x5B9A;&#x7FA9;
<verbatim>(sde:clear)

(define TSUB 150.0 )

(define Lpixel_pitchX 50.0)
(define LNplus_sizeX 30.0)

(define Lpixel_pitchY 50.0)
(define LNplus_sizeY 30.0)


(define NX @NX@)
(define NY @NY@)


(define LX (* NX Lpixel_pitchX))
(define LY (* NY Lpixel_pitchY))

(define Dop_PSub 1e12)
(define Dop_Nplus 1e19)
(define Dop_PPlus    1e+19)
(define Nplus_Depth 0.8)

</verbatim>

3D&#x306E;&#x30C7;&#x30D0;&#x30A4;&#x30B9;&#x3092;&#x88FD;&#x4F5C;&#x3059;&#x308B;&#x306B;&#x306F;&#x3044;&#x308D;&#x3093;&#x306A;&#x65B9;&#x6CD5;&#x304C;&#x3042;&#x308A;&#x307E;&#x3059;&#x3002;&#x3053;&#x3053;&#x3067;&#x306F;&#x30C7;&#x30D0;&#x30A4;&#x30B9;&#x30A8;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;&#x3068;&#x3044;&#x3046;&#x65B9;&#x6CD5;&#x3092;&#x7D39;&#x4ECB;&#x3057;&#x307E;&#x3059;&#x3002;gds&#x30D5;&#x30A1;&#x30A4;&#x30EB;&#x3092;&#x8AAD;&#x307F;&#x8FBC;&#x3093;&#x3060;&#x308A;&#x3044;&#x308D;&#x3093;&#x306A;&#x3053;&#x3068;&#x304C;&#x3067;&#x304D;&#x308B;&#x304B;&#x3089;&#x3067;&#x3059;&#x3002;

&#x30C7;&#x30D0;&#x30A4;&#x30B9;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;&#x307B;&#x3069;&#x7D30;&#x304B;&#x3044;&#x6307;&#x5B9A;&#x306F;&#x3067;&#x304D;&#x307E;&#x305B;&#x3093;&#x304C;&#x3001;deposit &#x3084;etching&#x304C;&#x53EF;&#x80FD;&#x3067;&#x3059;&#x3002;

&#x307E;&#x305A;&#x306F;&#x3001;&#x30DE;&#x30B9;&#x30AF;&#x3092;&#x4F5C;&#x3063;&#x3066;&#x3044;&#x304D;&#x307E;&#x3059;&#x3002;

&#x57FA;&#x672C;&#x7684;&#x306B;&#x306F; list &#x3068;&#x547C;&#x3070;&#x308C;&#x308B;&#x6570;&#x5B57;&#x306E;&#x914D;&#x5217;&#x3067; (x0 y0 x1 y1 x2 y2 x3 y3) &#x306E;&#x3088;&#x3046;&#x306B;&#x70B9;(x,y)&#x3092;&#x4F5C;&#x308A;&#x76F4;&#x7DDA;&#x3067;&#x7D50;&#x3093;&#x3060;&#x5F62;&#x306B;&#x306A;&#x308A;&#x307E;&#x3059;&#x3002;
<verbatim>(define nplist (list))

(
do ((i 0 (+ i 1))) ((>= i NY))
  (
  do ((j 0 (+ j 1))) ((>= j NX))
    (define ff (list 
      (+ (* j Lpixel_pitchX) (* 0.5 (- Lpixel_pitchX LNplus_sizeX))) 
      (+ (* i Lpixel_pitchY) (* 0.5 (- Lpixel_pitchY LNplus_sizeY)))
      (+ (* j Lpixel_pitchX) (* 0.5 (+ Lpixel_pitchX LNplus_sizeX))) 
      (+ (* i Lpixel_pitchY) (* 0.5 (- Lpixel_pitchY LNplus_sizeY)))
      (+ (* j Lpixel_pitchX) (* 0.5 (+ Lpixel_pitchX LNplus_sizeX))) 
      (+ (* i Lpixel_pitchY) (* 0.5 (+ Lpixel_pitchY LNplus_sizeY)))
      (+ (* j Lpixel_pitchX) (* 0.5 (- Lpixel_pitchX LNplus_sizeX))) 
      (+ (* i Lpixel_pitchY) (* 0.5 (+ Lpixel_pitchY LNplus_sizeY)))
    ))
    (set! nplist (append nplist (list ff)))
  )
)</verbatim> <pre>(sdepe:generate-mask "MaskNplus" nplist )</pre>

&#x4F55;&#x3092;&#x4F5C;&#x3063;&#x3066;&#x3044;&#x308B;&#x306E;&#x304B;&#x898B;&#x5F53;&#x306F;&#x4ED8;&#x304D;&#x307E;&#x3059;&#x304B;&#xFF1F; NX x NY &#x306E;&#x30D4;&#x30AF;&#x30BB;&#x30EB;&#x30DE;&#x30C8;&#x30EA;&#x30C3;&#x30AF;&#x30B9;&#x3092;&#x4F5C;&#x3063;&#x3066;&#x3044;&#x3066;&#x305D;&#x308C;&#x305E;&#x308C;&#x306E;&#x30D4;&#x30AF;&#x30BB;&#x30EB;&#x306B;Nplus&#x306E;&#x30B5;&#x30A4;&#x30BA;&#x306E;&#x6B63;&#x65B9;&#x5F62;&#x3092;list&#x306B;&#x3057;&#x3066;&#x305D;&#x3053;&#x304B;&#x3089; generate-mask&#x3067;&#x30DE;&#x30B9;&#x30AF;&#x3092;&#x4F5C;&#x3063;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;&#x3002;

<verbatim>
(sdegeo:create-cuboid (position 0 0 0) (position LX LY TSUB) "Silicon" "Substrate")
(sdepe:pattern "mask" "MaskNplus" "polarity" "dark" "material" "Resist" "thickness" 1  "type" "aniso" "algorithm" "sweep" )

(sdeio:save-tdr-bnd (get-body-list) "n@node@_pat0_Res_bnd.tdr")</verbatim>

&#x3053;&#x3053;&#x3067;&#x5B9F;&#x969B;&#x306B;&#x3082;&#x306E;&#x3092;&#x7F6E;&#x3044;&#x3066;&#x3044;&#x304D;&#x307E;&#x3059;&#x3002;&#x6700;&#x521D;&#x306E;sdegeo:create-cuboid&#x306F;&#x76F4;&#x65B9;&#x4F53;&#x3092;&#x4F5C;&#x3063;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;

&#x305D;&#x3053;&#x306B;&#x5148;&#x307B;&#x3069;&#x4F5C;&#x3063;&#x305F;MaskNplus&#x3068;&#x3044;&#x3046;&#x306E;&#x3092;patterning&#x3057;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;N+&#x306E;&#x30C9;&#x30FC;&#x30D7;&#x3092;&#x3059;&#x308B;&#x305F;&#x3081;&#x306B;&#x30C9;&#x30FC;&#x30D7;&#x3057;&#x305F;&#x304F;&#x306A;&#x3044;&#x90E8;&#x5206;&#x3092;&#x30EC;&#x30B8;&#x30B9;&#x30C8;&#x3067;&#x8986;&#x3044;&#x307E;&#x3059;&#x3002;

sdepe:pattern&#x3068;&#x3044;&#x3046;&#x306E;&#x306F;

"mask" : &#x30DE;&#x30B9;&#x30AF;&#x3092;&#x6307;&#x5B9A;

"polarity" : dark or light&#x3092;&#x6307;&#x5B9A;&#x3057;&#x307E;&#x3059;&#x3002;&#x534A;&#x5C0E;&#x4F53;&#x30D7;&#x30ED;&#x30BB;&#x30B9;&#x3068;&#x4E00;&#x7DD2;&#x3067;light&#x306E;&#x30DE;&#x30B9;&#x30AF;&#x306F;&#x30DE;&#x30B9;&#x30AF;&#x90E8;&#x5206;&#x304C;&#x900F;&#x660E;&#x3001;dark&#x306F;&#x30DE;&#x30B9;&#x30AF;&#x4EE5;&#x5916;&#x306E;&#x90E8;&#x5206;&#x304C;&#x900F;&#x660E;&#x306E;&#x30DE;&#x30B9;&#x30AF;&#x3067;&#x3059;&#x3002;

"material" : patterning&#x3092;&#x3059;&#x308B;&#x30DE;&#x30C6;&#x30EA;&#x30A2;&#x30EB;&#x3067;&#x3059;&#x3002;&#x4ECA;&#x56DE;&#x306F;&#x30EC;&#x30B8;&#x30B9;&#x30C8;

"type" : iso or aniso&#x306E;&#x9078;&#x629E;&#x3067;&#x3059;&#x3002;&#x3057;&#x305F;&#x304C;&#x5E73;&#x3089;&#x306A;&#x306E;&#x3067;&#x3042;&#x307E;&#x308A;&#x95A2;&#x4FC2;&#x306A;&#x3044;&#x3067;&#x3059;&#x304C;&#x3001;&#x4E0B;&#x56F3;&#x306E;&#x3088;&#x3046;&#x306A;&#x9055;&#x3044;&#x304C;&#x3042;&#x308A;&#x307E;&#x3059;&#x3002;

"algorithm" : &#x8868;&#x9762;&#x306E;offsetting&#x306E;&#x30A2;&#x30EB;&#x30B4;&#x30EA;&#x30BA;&#x30E0;&#x3002; aniso&#x306E;&#x5834;&#x5408;&#x306F; sweep&#x306E;&#x307F;&#x3002;

<img alt="ISO_ANISO.png" height="518" src="%ATTACHURLPATH%/ISO_ANISO.png" width="914" />

n1_pat0_Res_dvs.tdr &#x3068;&#x3044;&#x3046;&#x30D5;&#x30A1;&#x30A4;&#x30EB;&#x304C;&#x3042;&#x308B;&#x51FA;&#x6765;&#x3066;&#x3044;&#x308B;&#x3068;&#x601D;&#x3046;&#x306E;&#x3067;SVidual&#x3067;&#x78BA;&#x8A8D;&#x3057;&#x3066;&#x307F;&#x308B;&#x3002;

<img alt="n1_pat0.png" height="474" src="%ATTACHURLPATH%/n1_pat0.png" width="839" />

<verbatim>(sdedr:define-gaussian-profile "Nplus" "PhosphorusActiveConcentration" "PeakPos" 0  "PeakVal" Dop_Nplus "ValueAtDepth" Dop_PSub "Depth" Nplus_Depth "Gauss"  "Factor" 0.8)

(sdepe:implant "Nplus" "flat")

(entity:delete (find-material-id "Resist"))

(sdeio:save-tdr-bnd (get-body-list) "n@node@_pat1_rmRes_bnd.tdr")</verbatim>

&#x3053;&#x3053;&#x3067;&#x5148;&#x307B;&#x3069;&#x4F5C;&#x3063;&#x305F;&#x30EC;&#x30B8;&#x30B9;&#x30C8;&#x306E;&#x5F62;&#x306B;implant&#x3092;&#x4F5C;&#x6210;&#x3057;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;

sdedr:define-gausian-profile &#x3067;&#x30AC;&#x30A6;&#x30B9;&#x5206;&#x5E03;&#x306B;&#x5F93;&#x3046;&#x30EA;&#x30F3;&#x306E;&#x30C9;&#x30FC;&#x30D7;&#x3092;&#x8A2D;&#x5B9A;&#x3057;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;

&#x5F15;&#x6570;&#x306F;&#x5927;&#x4F53;&#x60F3;&#x50CF;&#x304C;&#x3064;&#x304F;&#x3068;&#x601D;&#x3044;&#x307E;&#x3059;&#x304C;&#x3001;Function&#x3068;Factor&#x306F;&#x5074;&#x9762;&#x306E;&#x5F62;&#x72B6;&#x3092;&#x6C7A;&#x3081;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;

implant&#x3092;&#x4F5C;&#x3063;&#x305F;&#x5F8C;&#x306F;resist&#x3092;&#x53D6;&#x3063;&#x6255;&#x3063;&#x3066;&#x3057;&#x307E;&#x3063;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;&#x3053;&#x3053;&#x307E;&#x3067;&#x306E;&#x30C7;&#x30D0;&#x30A4;&#x30B9;&#x3092; n1_pat1_rmRes_bnd.tdr&#x306B;&#x4FDD;&#x5B58;&#x3057;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;

&#x898B;&#x3066;&#x307F;&#x308B;&#x3068;resist&#x304C;&#x6D88;&#x3048;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;&#x30C9;&#x30FC;&#x30D7;&#x3092;&#x3057;&#x307E;&#x3057;&#x305F;&#x304C;&#x3053;&#x308C;&#x306F;&#x30E1;&#x30C3;&#x30B7;&#x30E5;&#x3092;&#x5207;&#x308B;&#x307E;&#x3067;&#x308F;&#x304B;&#x308A;&#x307E;&#x305B;&#x3093;...

&#x6700;&#x5F8C;&#x306E;(sde:build-mesh "snmesh" " " "n@node@_msh")&#x3000;save&#x306E;&#x76F4;&#x524D;&#x306B;&#x66F8;&#x3044;&#x3066;&#x6B8B;&#x308A;&#x3092;&#x30B3;&#x30E1;&#x30F3;&#x30C8;&#x30A2;&#x30A6;&#x30C8;&#x3059;&#x308C;&#x3070;&#x898B;&#x308C;&#x308B;&#x304B;&#x3082;&#x3057;&#x308C;&#x307E;&#x305B;&#x3093;&#x3002;

<img alt="n1_pat1.png" height="434" src="%ATTACHURLPATH%/n1_pat1.png" width="769" />
 <img alt="n1_pat2_msh.png" height="429" src="%ATTACHURLPATH%/n1_pat2_msh.png" width="760" />
<verbatim>(define hh (entity:copy (find-mask "MaskNplus")))
(sde:attrib-remove hh "maskname")
(generic:add hh "maskname" "MaskContAl")
(sde:offset-mask "MaskContAl" -10)


(sdepe:pattern "mask" "MaskContAl" "polarity" "light" "material" "Aluminum" "thickness" 0.5  "type" "aniso" "algorithm" "sweep" )

(sdeio:save-tdr-bnd (get-body-list) "n@node@_pat2_DCcont_bnd.tdr")</verbatim>

&#x3053;&#x3053;&#x3067;&#x306F;Al&#x3068;N+&#x306E;&#x30B3;&#x30F3;&#x30BF;&#x30AF;&#x30C8;&#x3092;&#x4F5C;&#x3063;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;&#x672C;&#x5F53;&#x306F;&#x3082;&#x3046;&#x4E00;&#x5EA6;&#x30DE;&#x30B9;&#x30AF;&#x3092;&#x4F5C;&#x308C;&#x3070;&#x3088;&#x3044;&#x306E;&#x3067;&#x3059;&#x304C;&#x3001;&#x9762;&#x5012;&#x306A;&#x306E;&#x3067;MaskNplus&#x3092;10um&#x5C0F;&#x3055;&#x304F;&#x3057;&#x305F;&#x65B0;&#x3057;&#x3044;&#x30DE;&#x30B9;&#x30AF; MaskContAl &#x3092;&#x88FD;&#x4F5C;&#x3057;&#x3066;&#x540C;&#x69D8;&#x306B;pattern&#x3092;&#x4F5C;&#x3063;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;

&#x3053;&#x3053;&#x307E;&#x3067;&#x306E;&#x69D8;&#x5B50;&#x306F;n1_pat2_DCcont_bnd.tdr&#x3067;&#x898B;&#x3089;&#x308C;&#x307E;&#x3059;&#x3002;

<img alt="n1_pat2.png" height="450" src="%ATTACHURLPATH%/n1_pat2.png" width="796" />

<verbatim>(sdepe:fill-device "material" "Oxide")

(sdeio:save-tdr-bnd (get-body-list) "n@node@_pat3_OxFill_bnd.tdr")</verbatim>

&#x30B3;&#x30F3;&#x30BF;&#x30AF;&#x30C8;&#x4EE5;&#x5916;&#x306E;&#x90E8;&#x5206;&#x306F;&#x9178;&#x5316;&#x819C;&#x3067;&#x8986;&#x3063;&#x3066;&#x304A;&#x304D;&#x307E;&#x3057;&#x3087;&#x3046;&#x3002;

n1_pat3_OxFill_bnd.tdr&#x3067;&#x78BA;&#x8A8D;&#x3067;&#x304D;&#x307E;&#x3059;&#x3002;(&#x898B;&#x3084;&#x3059;&#x3044;&#x3088;&#x3046;&#x306B;Z&#x8EF8;&#x3092;10&#x500D;&#x30B9;&#x30B1;&#x30FC;&#x30EB;&#x3057;&#x3066;&#x307E;&#x3059;&#x3002;)

<img alt="n1_pat3.png" height="445" src="%ATTACHURLPATH%/n1_pat3.png" width="787" />

<verbatim>(define gg (entity:copy (find-mask "MaskNplus")))
(sde:attrib-remove gg "maskname")
(generic:add gg "maskname" "MaskTopAl")
(sde:offset-mask "MaskTopAl" 5.0)
(sdepe:pattern "mask" "MaskTopAl" "polarity" "light" "material" "Aluminum" "thickness" 0.5  "type" "aniso" "algorithm" "sweep" )

(sdeio:save-tdr-bnd (get-body-list) "n@node@_pat4_Al_bnd.tdr")</verbatim>

&#x30C8;&#x30C3;&#x30D7;&#x306E;&#x30A2;&#x30EB;&#x30DF;&#x3082;&#x30DE;&#x30B9;&#x30AF;&#x306E;&#x518D;&#x5229;&#x7528;&#x3067;&#x4F5C;&#x308A;&#x307E;&#x3059;&#x3002;N+&#x3088;&#x308A;5um&#x307B;&#x3069;&#x5927;&#x304D;&#x306A;&#x30A2;&#x30EB;&#x30DF;&#x3092;&#x4F5C;&#x3063;&#x3066;&#x307E;&#x3059;&#x3002;

&#x7D50;&#x679C;&#x306F;n1_pat4_Al_bnd.tdr &#x3067;&#x898B;&#x308C;&#x307E;&#x3059;&#x3002;

<img alt="n1_pat4.png" height="454" src="%ATTACHURLPATH%/n1_pat4.png" width="804" />

<verbatim>(sdepe:fill-device "material" "Oxide")

(sdeio:save-tdr-bnd (get-body-list) "n@node@_pat5_OxFill_bnd.tdr")</verbatim>

&#x3053;&#x3061;&#x3089;&#x3082;&#x9178;&#x5316;&#x819C;&#x3092;Fill&#x3057;&#x3066;&#x304A;&#x304D;&#x307E;&#x3059;&#x3002;

<img alt="n1_pat5.png" height="444" src="%ATTACHURLPATH%/n1_pat5.png" width="786" />

<verbatim>(bool:unite (find-material-id "Oxide"))
(bool:unite (find-material-id "Aluminum"))
(sde:separate-lumps)
(sdeio:save-tdr-bnd (get-body-list) "n@node@_pat6_Unite_bnd.tdr")</verbatim>

&#x4E0A;&#x306E;&#x56F3;&#x3067;&#x4E8C;&#x6BB5;&#x968E;&#x306B;Al&#x3084;&#x9178;&#x5316;&#x819C;&#x3092;patterning&#x3057;&#x305F;&#x306E;&#x3067;&#x4E8C;&#x3064;&#x306E;&#x5225;&#x306E;&#x30D1;&#x30FC;&#x30C4;&#x306B;&#x306A;&#x3063;&#x3066;&#x3057;&#x307E;&#x3063;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;

&#x3053;&#x308C;&#x3092;&#x4E00;&#x3064;&#x306B;&#x3059;&#x308B;&#x306E;&#x304C; bool:unite &#x3068;&#x3044;&#x3046;&#x30B3;&#x30DE;&#x30F3;&#x30C9;&#x3067;&#x3059;&#x3002;&#x7D50;&#x679C;&#x306F;&#x3053;&#x3093;&#x306A;&#x611F;&#x3058;&#x3067;&#x3059;&#x3002;

<img alt="n1_pat6.png" height="466" src="%ATTACHURLPATH%/n1_pat6.png" width="824" />

&#x3053;&#x3053;&#x307E;&#x3067;&#x3067;&#x69CB;&#x9020;&#x4F53;&#x306F;&#x3067;&#x304D;&#x307E;&#x3057;&#x305F;&#x3002;

&#x3053;&#x3053;&#x304B;&#x3089;&#x306F;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;&#x306B;&#x5FC5;&#x8981;&#x306A;&#x30B3;&#x30F3;&#x30BF;&#x30AF;&#x30C8;&#x3068;n+&#x4EE5;&#x5916;&#x306E;&#x30C9;&#x30FC;&#x30D7;&#x3092;&#x884C;&#x3063;&#x3066;&#x3044;&#x304D;&#x307E;&#x3059;&#x3002;

&#x307E;&#x305A;&#x306F;&#x8868;&#x9762;&#x306E;n+&#x96FB;&#x6975;&#x3067;&#x3059;&#x3002;
<verbatim>;;  making contact for Electrode
(
do ((i 0 (+ i 1))) ((>= i NY))
  (
    do ((j 0 (+ j 1))) ((>= j NX))
      (sde:add-material (find-body-id 
        (position (+ (* j Lpixel_pitchX) (* 0.5 Lpixel_pitchX)) 
                  (+ (* i Lpixel_pitchY) (* 0.5 Lpixel_pitchY)) 
                  (+ TSUB 0.1)))
	"Aluminum" (string-append "RAl" (number->string j) (number->string i)))
      (sdegeo:define-contact-set (string-append "NplusElec" (number->string j) 
                                 (number->string i)) 4  (color:rgb 1 0 0 ) "##")
      (sdegeo:set-current-contact-set (string-append "NplusElec" (number->string j) (number->string i)) )
      (sdegeo:set-contact-boundary-faces (find-region-id (string-append "RAl" (number->string j) (number->string i)))
    )
  )
)

(sdeio:save-tdr-bnd (get-body-list) "n@node@_pat7_ContNp_bnd.tdr")</verbatim>

&#x898B;&#x308B;&#x3068;&#x5927;&#x4F53;&#x4F55;&#x3092;&#x3084;&#x3063;&#x3066;&#x3044;&#x308B;&#x304B;&#x308F;&#x304B;&#x308B;&#x3068;&#x601D;&#x3044;&#x307E;&#x3059;&#x3002;&#x96FB;&#x6975;&#x306B;&#x306A;&#x308B;&#x90E8;&#x5206;&#x306E;&#x4E00;&#x70B9;&#x3092;&#x6307;&#x5B9A;&#x3057;&#x3066;find-body-id&#x3092;&#x3057;&#x3066;&#x305D;&#x308C;&#x3092;contact-set&#x3057;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;

SVidual&#x3067;&#x306F;&#x30DE;&#x30B8;&#x30A7;&#x30F3;&#x30C0;&#x306B;&#x8868;&#x793A;&#x3055;&#x308C;&#x308B;&#x306E;&#x3067;&#x78BA;&#x8A8D;&#x3057;&#x3066;&#x307F;&#x3066;&#x304F;&#x3060;&#x3055;&#x3044;&#x3002;

<img alt="n1_pat7.png" height="453" src="%ATTACHURLPATH%/n1_pat7.png" width="803" />
<verbatim>;; doping for backside
(sdedr:define-refeval-window "RefEval_PBack" "Rectangle"  (position 0 0 0) (position LX LY 0))
(sdedr:define-gaussian-profile "DopPBack" "BoronActiveConcentration" "PeakPos" 0  "PeakVal" Dop_PPlus "ValueAtDepth" Dop_PSub "Depth" 5 "Gauss"  "Factor" 0.8)
(sdedr:define-analytical-profile-placement "Place_PBack" "DopPBack" "RefEval_PBack" "Both" "NoReplace" "Eval")</verbatim>

&#x3053;&#x3053;&#x3067;&#x306F;&#x88CF;&#x9762;&#x306B;p+&#x3092;&#x30C9;&#x30FC;&#x30D7;&#x3057;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;&#x3053;&#x308C;&#x3082;&#x30AC;&#x30A6;&#x30B9;&#x5206;&#x5E03;&#x3067;&#x30C9;&#x30FC;&#x30D7;&#x3057;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;
<verbatim>;; making contact for backside 
(sdegeo:define-contact-set "PBack" 4  (color:rgb 1 0 0 ) "##")
(sdegeo:set-current-contact-set "PBack")
(sdegeo:set-contact-faces (find-face-id (position 0.1 0.1 0)))

(sdeio:save-tdr-bnd (get-body-list) "n@node@_pat8_ContBack_bnd.tdr")</verbatim>

&#x30C9;&#x30FC;&#x30D7;&#x3057;&#x305F;&#x88CF;&#x9762;&#x3092;&#x30D0;&#x30A4;&#x30A2;&#x30B9;&#x3092;&#x304B;&#x3051;&#x308B;&#x305F;&#x3081;&#x306E;&#x96FB;&#x6975;&#x306B;&#x8A2D;&#x5B9A;&#x3057;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;

&#x4E0B;&#x5074;&#x306B;&#x96FB;&#x6975;&#x304C;&#x3067;&#x304D;&#x305F;&#x306E;&#x3092;&#x78BA;&#x8A8D;&#x3057;&#x3066;&#x307F;&#x3066;&#x304F;&#x3060;&#x3055;&#x3044;&#x3002;

<img alt="n1_pat8.png" height="436" src="%ATTACHURLPATH%/n1_pat8.png" width="771" />

<verbatim>;;(entity:delete (find-material-id "Aluminum"))</verbatim>

&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;&#x81EA;&#x4F53;&#x306B;&#x306F;Al&#x306F;&#x5FC5;&#x8981;&#x306A;&#x3044;&#x306E;&#x3067;&#x6D88;&#x3057;&#x3066;&#x3057;&#x307E;&#x3063;&#x3066;&#x3082;&#x3088;&#x3044;&#x306E;&#x3067;&#x3059;&#x304C;&#x3001;&#x3042;&#x3063;&#x3066;&#x3082;&#x3088;&#x3044;&#x306E;&#x3067;&#x3053;&#x3053;&#x306F;&#x30B3;&#x30E1;&#x30F3;&#x30C8;&#x30A2;&#x30A6;&#x30C8;&#x3057;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;
<verbatim>;; doping for substrate
(sdedr:define-constant-profile "ConstantProfileDefinition_1" "BoronActiveConcentration" Dop_PSub)
(sdedr:define-constant-profile-material "ConstantProfilePlacement_1" "ConstantProfileDefinition_1" "Silicon")
;; mesh refinement for
(sdedr:define-refinement-size "RefinementDefinition_1" (* 0.1 LX) (* 0.1 LY) (/ TSUB 20.0) 0.5 0.5 0.5 )
(sdedr:define-refinement-placement "RefinementPlacement_1" "RefinementDefinition_1" (list "material" "Silicon" ) )
(sdedr:define-refinement-function "RefinementDefinition_1" "DopingConcentration" "MaxTransDiff" 1)</verbatim>

&#x30B7;&#x30EA;&#x30B3;&#x30F3;&#x5C64;&#x306B;&#x30DB;&#x30A6;&#x7D20;&#x3092;&#x30C9;&#x30FC;&#x30D7;&#x3057;&#x3066;&#x305D;&#x306E;&#x5F8C;&#x30E1;&#x30C3;&#x30B7;&#x30E5;&#x3092;&#x5207;&#x3063;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;&#x3053;&#x306E;&#x5207;&#x308A;&#x65B9;&#x306F;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;&#x306E;&#x65E9;&#x3055;&#x306B;&#x3082;&#x3064;&#x306A;&#x304C;&#x308B;&#x306E;&#x3067;&#x6700;&#x9069;&#x5316;&#x304C;&#x5FC5;&#x8981;&#x3067;&#x3059;&#x3002;
<verbatim>;(sdegeo:translate-selected (get-body-list) (transform:translation (gvector (- 0 (* 0.5 LX)) (- 0 (* 0.5 LY)) 0)) #f 0)
;(sdegeo:translate-selected (get-drs-list) (transform:translation (gvector (- 0 (* 0.5 LX)) (- 0 (* 0.5 LY)) 0)) #f 0)

(sde:build-mesh "snmesh" " " "n@node@_msh")</verbatim>

translate-selected&#x306F;&#x3001;&#x8EF8;&#x3092;&#x3057;&#x3075;&#x3068;&#x3055;&#x305B;&#x308B;&#x30B3;&#x30DE;&#x30F3;&#x30C9;&#x3067;&#x3059;&#x3002;&#x771F;&#x3093;&#x4E2D;&#x306E;&#x30D4;&#x30AF;&#x30BB;&#x30EB;&#x306E;&#x4E2D;&#x5FC3;&#x3092;(0,0)&#x306B;&#x3057;&#x305F;&#x3044;&#x3068;&#x304D;&#x306F;&#x3053;&#x308C;&#x3092;&#x3084;&#x308B;&#x5FC5;&#x8981;&#x304C;&#x3042;&#x308A;&#x307E;&#x3059;&#x3002;

(&#x305F;&#x3060;&#x3057;&#x3001;Al&#x3092;remove&#x3057;&#x3066;&#x3044;&#x306A;&#x3044;&#x3068;&#x96FB;&#x6975;&#x304C;&#x30B7;&#x30D5;&#x30C8;&#x3057;&#x306A;&#x3044;&#x554F;&#x984C;&#x304C;&#x3042;&#x308A;&#x307E;&#x3059;&#x3002;&#x3061;&#x3087;&#x3063;&#x3068;&#x3088;&#x304F;&#x308F;&#x304B;&#x3063;&#x3066;&#x3044;&#x307E;&#x305B;&#x3093;&#x3002;)

&#x4EE5;&#x4E0A;&#x3067;&#x5B8C;&#x6210;&#x3067;&#x3059;&#x3002;&#x6700;&#x7D42;&#x7684;&#x306B;&#x3053;&#x3093;&#x306A;&#x3082;&#x306E;&#x304C;&#x51FA;&#x6765;&#x4E0A;&#x304C;&#x308A;&#x307E;&#x3059;&#x3002; n1_msh.tdr&#x3068;&#x3044;&#x3046;&#x30D5;&#x30A1;&#x30A4;&#x30EB;&#x3067;&#x3059;&#x3002;

<img alt="n1_msh.png" height="889" src="%ATTACHURLPATH%/n1_msh.png" width="1572" />

---++ GDS&#x30D5;&#x30A1;&#x30A4;&#x30EB;&#x306E;&#x8AAD;&#x307F;&#x8FBC;&#x307F;

GDS&#x30D5;&#x30A1;&#x30A4;&#x30EB;&#x3092;&#x8AAD;&#x307F;&#x8FBC;&#x3080;&#x3053;&#x3068;&#x306F;&#x96E3;&#x3057;&#x304F;&#x306F;&#x306A;&#x3044;&#x304C;&#x3001;GDS&#x306E;&#x60C5;&#x5831;&#x306F;&#x3042;&#x304F;&#x307E;&#x3067;&#x3082;&#x4E8C;&#x6B21;&#x5143;&#x306E;&#x30DE;&#x30B9;&#x30AF;&#x306A;&#x306E;&#x3067;(&#x4E0A;&#x306E;&#x4F8B;&#x3067;&#x6563;&#x3005;&#x4F5C;&#x3063;&#x305F;Mask)&#x3053;&#x308C;&#x3092;&#x767A;&#x5C55;&#x3055;&#x305B;&#x3066;&#x3061;&#x3083;&#x3093;&#x3068;&#x3057;&#x305F;&#x69CB;&#x9020;&#x306B;&#x3059;&#x308B;&#x5FC5;&#x8981;&#x304C;&#x3042;&#x308B;&#x3002;

<pre><br />cd ~/work/Silicon/TCAD/Synopsys/tutorial <br />mkdir -p tar_src <br />cd tar_src <br />cp ~kojin/work/Silicon/TCAD/Synopsys/tutorials/1stTCADWorkshop/LOAD_GDS.tar.gz . <br />swb&</pre>

&#x524D;&#x306E;&#x4F8B;&#x3068;&#x540C;&#x69D8;&#x306B;LGAD_GDS&#x3068;&#x3044;&#x3046;&#x30D7;&#x30ED;&#x30B8;&#x30A7;&#x30AF;&#x30C8;&#x3092;&#x4F5C;&#x3063;&#x3066;&#x5B9F;&#x884C;&#x3057;&#x3066;&#x307F;&#x3066;&#x304F;&#x3060;&#x3055;&#x3044;&#x3002;

SDE&#x3068;SPROCESS&#x306E;&#x4F8B;&#x304C;&#x4E21;&#x65B9;&#x5165;&#x3063;&#x3066;&#x3044;&#x307E;&#x3059;&#x304C;&#x3001;SDE&#x306E;&#x65B9;&#x3092;&#x5B9F;&#x884C;&#x3057;&#x3066;&#x307F;&#x3066;&#x304F;&#x3060;&#x3055;&#x3044;&#x3002;

GDS&#x30D5;&#x30A1;&#x30A4;&#x30EB;&#x3092;&#x8AAD;&#x3093;&#x3067;&#x3044;&#x308B;&#x5834;&#x6240;&#x306F;&#x3053;&#x3053;&#x3067;&#x3059;&#x3002;

<verbatim>(define GDSFILE "TCAD_PIXEL_v3.gds")
(define CELLNAME "TCAD_PIXEL_v3")
(define LAYERNAMES (list 'PWELL 'POLY 'ACT 'NO_PW 'NPLUS 'CONT 'PW_LVT 'MET1 'VIA1 'MET2 'VIA2 'MET3 'VIA3 'MET4 'ULENS 'PD1 'PD2 'SN1 'SN2 'SN3 ))
(define LAYERNUMBERS (list '1:0 '8:0 '9:0 '17:82 '32:0 '34:0 '35:0 '40:0 '41:0 '42:0 '43:0 '44:0 '49:0 '50:0 '89:0 '92:82 '93:0 '94:0 '94:43 '94:95 ))

(sdeicwb:gds2mac "gds.file" GDSFILE "cell" CELLNAME "layer.names" LAYERNAMES "layer.numbers" LAYERNUMBERS "sim3d" (list 0 -6000 6000 0) "scale" 1.0e-3 "domain.name" "SIM3D" "mac.file" "TCAD_PIXEL")

(read-layout-init-domain "TCAD_PIXEL_SIM3D.mac" #f "SIM3D")</verbatim>

GDS&#x30D5;&#x30A1;&#x30A4;&#x30EB;&#x306B;&#x306F;&#x30DE;&#x30B9;&#x30AF;&#x306E;&#x6570;&#x3060;&#x3051;LAYER&#x304C;&#x5165;&#x3063;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;&#x305D;&#x306E;&#x756A;&#x53F7;&#x3068;&#x540D;&#x524D;&#x3092;&#x30A2;&#x30B5;&#x30A4;&#x30F3;&#x3057;&#x3066;&#x3044;&#x3063;&#x3066;&#x3001;&#x6700;&#x7D42;&#x7684;&#x306B;&#x305D;&#x306E;&#x30DE;&#x30B9;&#x30AF;&#x306E;&#x70B9;&#x60C5;&#x5831;&#x3092;.mac&#x30D5;&#x30A1;&#x30A4;&#x30EB;&#x306B;&#x66F8;&#x304D;&#x51FA;&#x3057;&#x3066;&#x3044;&#x308B;&#x3060;&#x3051;&#x3067;&#x3059;&#x3002;

GDS&#x30D5;&#x30A1;&#x30A4;&#x30EB;&#x3092;&#x958B;&#x3051;&#x308B;&#x4EBA;&#x306F;&#x898B;&#x308B;&#x3068;&#x3053;&#x3093;&#x306A;&#x611F;&#x3058;&#x306B;&#x306A;&#x3063;&#x3066;&#x3044;&#x307E;&#x3059;&#x3002;

<img alt="2018-06-25.png" height="586" src="%ATTACHURLPATH%/2018-06-25.png" width="621" />

&#x305D;&#x306E;&#x5F8C;&#x306F;&#x3072;&#x305F;&#x3059;&#x3089;&#x3053;&#x306E;&#x30DE;&#x30B9;&#x30AF;&#x3092;&#x3082;&#x3068;&#x306B;&#x69CB;&#x9020;&#x4F53;&#x3092;&#x4F5C;&#x3063;&#x3066;&#x3044;&#x304D;&#x307E;&#x3059;&#x3002;

<verbatim>(define TSUB 7.0)

(sdepe:add-substrate "material" "Silicon" "thickness" TSUB "region" "substrat") 

(sdepe:pattern "mask" "ACT" "polarity" "light" "material" "Resist" "thickness" 1  "type" "aniso" "algorithm" "sweep" )

(sdepe:etch-material "material" "Silicon" "depth" 0.420  "taper-angle" 5) 

(entity:delete (find-material-id "Resist"))

(sdepe:fill-device "material" "Oxide" "height" (+ TSUB 0.008))


(sdepe:pattern "mask" "POLY" "polarity" "light" "material" "PolySilicon" "thickness" 0.3  "type" "aniso" "algorithm" "sweep" )

(sdepe:depo "material" "dummy" "thickness" 0.03 "type" "iso" "algorithm" "lopx")
(sdepe:etch-material "material" "dummy" "depth" 0.03  "type" "aniso") </verbatim>

&#x3082;&#x3046;&#x4F55;&#x3092;&#x3084;&#x3063;&#x3066;&#x3044;&#x308B;&#x306E;&#x304B;&#x5927;&#x4F53;&#x308F;&#x304B;&#x3063;&#x3066;&#x304D;&#x305F;&#x304B;&#x3068;&#x601D;&#x3044;&#x307E;&#x3059;&#x3002;

&#x6700;&#x7D42;&#x7684;&#x306B;&#x306F;&#x3053;&#x3093;&#x306A;&#x3082;&#x306E;&#x304C;&#x51FA;&#x6765;&#x4E0A;&#x304C;&#x3063;&#x3066;&#x304D;&#x307E;&#x3059;&#x3002;

<img alt="load_gds.png" height="554" src="%ATTACHURLPATH%/load_gds.png" width="981" />

---++ HPK 6th mask &#x306E;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;

&#x4EE5;&#x4E0A;&#x306E;&#x3053;&#x3068;&#x3092;&#x7D44;&#x307F;&#x5408;&#x308F;&#x305B;&#x308B;&#x3068;HPK&#x306E;&#x30BB;&#x30F3;&#x30B5;&#x30FC;&#x3082;&#x304B;&#x306A;&#x308A;&#x3061;&#x3083;&#x3093;&#x3068;&#x518D;&#x73FE;&#x3067;&#x304D;&#x307E;&#x3059;&#x3002;

<pre><br />cd ~/work/Silicon/TCAD/Synopsys/tutorial <br />mkdir -p tar_src <br />cd tar_src <br />cp ~kojin/work/Silicon/TCAD/Synopsys/tutorial/1stTCADWorkshop/HPK6th3D.tar.gz . <br />swb&</pre>

&#x540C;&#x3058;&#x3088;&#x3046;&#x306B;&#x8D70;&#x3089;&#x305B;&#x308B;&#x3068;structure&#x304C;&#x3067;&#x304D;&#x308B;&#x3002;

<img alt="hpk3d.png" height="889" src="%ATTACHURLPATH%/hpk3d.png" width="1572" />

-- %USERSIG{KojiNakamura - 2018-06-24}%
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png	2018-06-25.png	r1	manage	19.5 K	2018-06-24 - 23:12	KojiNakamura
png	ISO_ANISO.png	r1	manage	57.0 K	2018-06-24 - 23:19	KojiNakamura
png	hpk3d.png	r1	manage	84.6 K	2018-06-27 - 03:17	KojiNakamura
png	load_gds.png	r1	manage	83.2 K	2018-06-24 - 23:12	KojiNakamura
png	n1_msh.png	r1	manage	98.7 K	2018-06-24 - 22:36	KojiNakamura
png	n1_pat0.png	r1	manage	79.3 K	2018-06-24 - 22:36	KojiNakamura
png	n1_pat1.png	r1	manage	74.5 K	2018-06-24 - 22:36	KojiNakamura
png	n1_pat2.png	r1	manage	74.8 K	2018-06-24 - 22:36	KojiNakamura
png	n1_pat2_msh.png	r1	manage	90.5 K	2018-06-24 - 22:46	KojiNakamura
png	n1_pat3.png	r1	manage	78.4 K	2018-06-24 - 22:36	KojiNakamura
png	n1_pat4.png	r1	manage	78.9 K	2018-06-24 - 22:36	KojiNakamura
png	n1_pat5.png	r1	manage	79.9 K	2018-06-24 - 22:36	KojiNakamura
png	n1_pat6.png	r1	manage	79.5 K	2018-06-24 - 22:36	KojiNakamura
png	n1_pat7.png	r1	manage	79.0 K	2018-06-24 - 22:36	KojiNakamura
png	n1_pat8.png	r1	manage	84.1 K	2018-06-24 - 22:36	KojiNakamura
Topic revision: r4 - 2020-05-16 - KojiNakamura