---+ !RD53A !testing@CERN %TOC% ---++ KEK53-4 *ch-pitch : 50×50um* *BR下 !SiO2膜 : STD* *PolySi-Al間のSiO2膜 : STD* *Poly-Si抵抗 : 10kΩ/□* | *Region* | *Poly-Si* | *N+ size* | *plot* || | 1 | 有 | Large | <img alt="KEK53-4_region1.png" src="%ATTACHURL%/KEK53-4_region1.png" /> | <img alt="KEK53-4_no0_region1.png" src="%ATTACHURL%/KEK53-4_no0_region1.png" /> | | 2 | ^ | STD | <img alt="KEK53-4_region2.png" src="%ATTACHURL%/KEK53-4_region2.png" /> | <img alt="KEK53-4_no0_region2.png" src="%ATTACHURL%/KEK53-4_no0_region2.png" /> | | 3 | 無 | Large | <img alt="KEK53-4_region3.png" src="%ATTACHURL%/KEK53-4_region3.png" /> | <img alt="KEK53-4_no0_region3.png" src="%ATTACHURL%/KEK53-4_no0_region3.png" /> | | 4 | ^ | STD | <img alt="KEK53-4_region4.png" src="%ATTACHURL%/KEK53-4_region4.png" /> | <img alt="KEK53-4_no0_region4.png" src="%ATTACHURL%/KEK53-4_no0_region4.png" /> | ---++ KEK53-5 *ch-pitch : 50×50um* *BR下 !SiO2膜 : STD* *PolySi-Al間のSiO2膜 : STD* *Poly-Si抵抗 : 10kΩ/□* | *Region* | *Poly-Si* | *N+ size* | *plot* || | 1 | 有 | Large | | | | 2 | ^ | STD | | | | 3 | 無 | Large | | | | 4 | ^ | STD | | | ---++ KEK53-6 *ch-pitch : 50×50um* *BR下 !SiO2膜 : STD* *PolySi-Al間のSiO2膜 : STD* *Poly-Si抵抗 : 10kΩ/□* | *Region* | *Poly-Si* | *N+ size* | *plot* || | 1 | 有 | Large | <img alt="KEK53-6_region1.png" src="%ATTACHURL%/KEK53-6_region1.png" /> | <img alt="KEK53-6_no0_region1.png" src="%ATTACHURL%/KEK53-6_no0_region1.png" /> | | 2 | ^ | STD | <img alt="KEK53-6_region2.png" src="%ATTACHURL%/KEK53-6_region2.png" /> | <img alt="KEK53-6_no0_region2.png" src="%ATTACHURL%/KEK53-6_no0_region2.png" /> | | 3 | 無 | Large | <img alt="KEK53-6_region3.png" src="%ATTACHURL%/KEK53-6_region3.png" /> | <img alt="KEK53-6_no0_region3.png" src="%ATTACHURL%/KEK53-6_no0_region3.png" /> | | 4-1 | ^ | STD | <img alt="KEK53-6_region4-1.png" src="%ATTACHURL%/KEK53-6_region4-1.png" /> | <img alt="KEK53-6_no0_region4-1.png" src="%ATTACHURL%/KEK53-6_no0_region4-1.png" /> | | 4-2 | ^ | Small | <img alt="KEK53-6_region4-2.png" src="%ATTACHURL%/KEK53-6_region4-2.png" /> | <img alt="KEK53-6_no0_region4-2.png" src="%ATTACHURL%/KEK53-6_no0_region4-2.png" /> | ---++ KEK53-7 *ch-pitch : %RED%25×100um%ENDCOLOR%* *BR下 !SiO2膜 : STD* *PolySi-Al間のSiO2膜 : STD* *Poly-Si抵抗 : 10kΩ/□* | *Region* | *Poly-Si* | *N+ size* | *plot* || | 1 | 有 | Large | <img alt="KEK53-7_region1.png" src="%ATTACHURL%/KEK53-7_region1.png" /> | <img alt="KEK53-7_no0_region1.png" src="%ATTACHURL%/KEK53-7_no0_region1.png" /> | | 2 | ^ | STD | <img alt="KEK53-7_region2.png" src="%ATTACHURL%/KEK53-7_region2.png" /> | <img alt="KEK53-7_no0_region2.png" src="%ATTACHURL%/KEK53-7_no0_region2.png" /> | | 3 | 無 | Large | <img alt="KEK53-7_region3.png" src="%ATTACHURL%/KEK53-7_region3.png" /> | <img alt="KEK53-7_no0_region3.png" src="%ATTACHURL%/KEK53-7_no0_region3.png" /> | | 4 | ^ | STD | <img alt="KEK53-7_region4.png" src="%ATTACHURL%/KEK53-7_region4.png" /> | <img alt="KEK53-7_no0_region4.png" src="%ATTACHURL%/KEK53-7_no0_region4.png" /> | ---++ KEK53-8 *ch-pitch : %RED%25×100um%ENDCOLOR%* *BR下 !SiO2膜 : STD* *PolySi-Al間のSiO2膜 : STD* *Poly-Si抵抗 : 10kΩ/□* | *Region* | *Poly-Si* | *N+ size* | *plot* || | 1 | 有 | Large | | | | 2 | ^ | STD | | | | 3 | 無 | Large | | | | 4 | ^ | STD | | | ---++ KEK53-9 *ch-pitch : 50×50um* *BR下 !SiO2膜 : STD* *PolySi-Al間のSiO2膜 : %RED%thick%ENDCOLOR%* *Poly-Si抵抗 : 10kΩ/□* | *Region* | *Poly-Si* | *N+ size* | *plot* || | 1 | 有 | Large | <img alt="KEK53-9_region1.png" src="%ATTACHURL%/KEK53-9_region1.png" /> | <img alt="KEK53-9_no0_region1.png" src="%ATTACHURL%/KEK53-9_no0_region1.png" /> | | 2 | ^ | STD | <img alt="KEK53-9_region2.png" src="%ATTACHURL%/KEK53-9_region2.png" /> | <img alt="KEK53-9_no0_region2.png" src="%ATTACHURL%/KEK53-9_no0_region2.png" /> | | 3 | 無 | Large | <img alt="KEK53-9_region3.png" src="%ATTACHURL%/KEK53-9_region3.png" /> | <img alt="KEK53-9_no0_region3.png" src="%ATTACHURL%/KEK53-9_no0_region3.png" /> | | 4-1 | ^ | STD | <img alt="KEK53-9_region4-1.png" src="%ATTACHURL%/KEK53-9_region4-1.png" /> | <img alt="KEK53-9_no0_region4-1.png" src="%ATTACHURL%/KEK53-9_no0_region4-1.png" /> | | 4-2 | ^ | Small | <img alt="KEK53-9_region4-2.png" src="%ATTACHURL%/KEK53-9_region4-2.png" /> | <img alt="KEK53-9_no0_region4-2.png" src="%ATTACHURL%/KEK53-9_no0_region4-2.png" /> | ---++ KEK53-10 *ch-pitch : 50×50um* *BR下 !SiO2膜 : %RED%thick%ENDCOLOR%* *PolySi-Al間のSiO2膜 : STD* *Poly-Si抵抗 : 10kΩ/□* | *Region* | *Poly-Si* | *N+ size* | *plot* || | 1 | 有 | Large | | | | 2 | ^ | STD | | | | 3 | 無 | Large | | | | 4 | ^ | STD | | | ---++ KEK53-11 *ch-pitch : 50×50um* *BR下 !SiO2膜 : %RED%thick%ENDCOLOR%* *PolySi-Al間のSiO2膜 : STD* *Poly-Si抵抗 : 10kΩ/□* | *Region* | *Poly-Si* | *N+ size* | *plot* || | 1 | 有 | Large | <img alt="KEK53-11_region1.png" src="%ATTACHURL%/KEK53-11_region1.png" /> | <img alt="KEK53-11_no0_region1.png" src="%ATTACHURL%/KEK53-11_no0_region1.png" /> | | 2 | ^ | STD | <img alt="KEK53-11_region2.png" src="%ATTACHURL%/KEK53-11_region2.png" /> | <img alt="KEK53-11_no0_region2.png" src="%ATTACHURL%/KEK53-11_no0_region2.png" /> | | 3 | 無 | Large | <img alt="KEK53-11_region3.png" src="%ATTACHURL%/KEK53-11_region3.png" /> | <img alt="KEK53-11_no0_region3.png" src="%ATTACHURL%/KEK53-11_no0_region3.png" /> | | 4 | ^ | STD | <img alt="KEK53-11_region4.png" src="%ATTACHURL%/KEK53-11_region4.png" /> | <img alt="KEK53-11_no0_region4.png" src="%ATTACHURL%/KEK53-11_no0_region4.png" /> | ---++ KEK53-12 *ch-pitch : 50×50um* *BR下 !SiO2膜 : STD* *PolySi-Al間のSiO2膜 : STD* *Poly-Si抵抗 : %RED%3kΩ/□%ENDCOLOR%* | *Region* | *Poly-Si* | *N+ size* | *plot* || | 1 | 有 | Large | <img alt="KEK53-12_region1.png" src="%ATTACHURL%/KEK53-12_region1.png" /> | <img alt="KEK53-12_no0_region1.png" src="%ATTACHURL%/KEK53-12_no0_region1.png" /> | | 2 | ^ | STD | <img alt="KEK53-12_region2.png" src="%ATTACHURL%/KEK53-12_region2.png" /> | <img alt="KEK53-12_no0_region2.png" src="%ATTACHURL%/KEK53-12_no0_region2.png" /> | | 3 | 無 | Large | <img alt="KEK53-12_region3.png" src="%ATTACHURL%/KEK53-12_region3.png" /> | <img alt="KEK53-12_no0_region3.png" src="%ATTACHURL%/KEK53-12_no0_region3.png" /> | | 4 | ^ | STD | <img alt="KEK53-12_region4.png" src="%ATTACHURL%/KEK53-12_region4.png" /> | <img alt="KEK53-12_no0_region4.png" src="%ATTACHURL%/KEK53-12_no0_region4.png" /> | ---++ KEK53-13 *ch-pitch : 50×50um* *BR下 !SiO2膜 : STD* *PolySi-Al間のSiO2膜 : STD* *Poly-Si抵抗 : %RED%30kΩ/□%ENDCOLOR%* | *Region* | *Poly-Si* | *N+ size* | *plot* || | 1 | 有 | Large | <img alt="KEK53-13_region1.png" src="%ATTACHURL%/KEK53-13_region1.png" /> | <img alt="KEK53-13_no0_region1.png" src="%ATTACHURL%/KEK53-13_no0_region1.png" /> | | 2 | ^ | STD | <img alt="KEK53-13_region2.png" src="%ATTACHURL%/KEK53-13_region2.png" /> | <img alt="KEK53-13_no0_region2.png" src="%ATTACHURL%/KEK53-13_no0_region2.png" /> | | 3 | 無 | Large | <img alt="KEK53-13_region3.png" src="%ATTACHURL%/KEK53-13_region3.png" /> | <img alt="KEK53-13_no0_region3.png" src="%ATTACHURL%/KEK53-13_no0_region3.png" /> | | 4 | ^ | STD | <img alt="KEK53-13_region4.png" src="%ATTACHURL%/KEK53-13_region4.png" /> | <img alt="KEK53-13_no0_region4.png" src="%ATTACHURL%/KEK53-13_no0_region4.png" /> | -- %USERSIG{AtlasjSilicon - 2018-07-06}% ---++ Comments %COMMENT%
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This topic: Main
>
PlanerPixelTestBeam
>
Jul2018CERNTestbeam
>
July2018CERNTBlog
>
RD53AtestingatCERN
Topic revision: r4 - 2018-07-06 - AtlasjSilicon
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