Tutorial4thTCADDay4 < Main

---+ 4&#x65E5;&#x76EE; (&#x653E;&#x5C04;&#x7DDA;&#x8010;&#x6027;&#x306E;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;)

%TOC%

---++ TCAD &#x8868;&#x9762;&#x640D;&#x50B7;&#x306E;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;
---+++ &#x8868;&#x9762;&#x640D;&#x50B7;&#x306E;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;&#x6982;&#x8981;

&#x8B1B;&#x7FA9;&#x53C2;&#x7167;
---+++ &#x8868;&#x9762;&#x640D;&#x50B7;&#x306E;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;&#x5B9F;&#x7FD2;

---++ TCAD &#x30D0;&#x30EB;&#x30AF;&#x640D;&#x50B7;&#x306E;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;
---+++ &#x30D0;&#x30EB;&#x30AF;&#x640D;&#x50B7;&#x306E;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;&#x6982;&#x8981;

&#x8B1B;&#x7FA9;&#x53C2;&#x7167;
---+++ &#x30D0;&#x30EB;&#x30AF;&#x640D;&#x50B7;&#x306E;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;&#x5B9F;&#x7FD2;

2D&#x306E;pixel simulation&#x306E;sample&#x3092;&#x5C55;&#x958B;&#x3057;&#x3066;&#x306F;&#x77E5;&#x3089;&#x305B;&#x3066;&#x307F;&#x308B;&#x3002;

<verbatim>source /home/software/scripts/common.sh 
source /home/software/scripts/vdec-license.sh 
#source /home/software/scripts/synopsys.sh
source /home/software/scripts/synopsys2016sp2.sh
export STDB=~/work/Sentaurus


mkdir -p ~/work/Silicon/TCAD/Synopsys/tutorials/
cd  ~/work/Silicon/TCAD/Synopsys/tutorials/
mkdir tar_src
cp  /home/kojin/work/Silicon/TCAD/Synopsys/tutorials/2ndTCADWorkshop/Pixel2DIrradSim.tar.gz tar_src/
swb &</verbatim>

&#x30B3;&#x30D4;&#x30FC;&#x3057;&#x305F;Pixel2DIrradSim.tar.gz&#x3092;&#x958B;&#x3044;&#x3066; Save As &#x3067;&#x3000;~/work/Silicon/TCAD/Synopsys/tutorials/&#x306B;&#x4FDD;&#x5B58;

&#x30EF;&#x30FC;&#x30AF;&#x30D9;&#x30F3;&#x30C1;&#x306F;&#x3053;&#x306E;&#x3088;&#x3046;&#x306B;&#x306A;&#x3063;&#x3066;&#x3044;&#x308B;&#x3002;

<img alt="Pixel2DIrradSim.png" height="601" src="%ATTACHURLPATH%/Pixel2DIrradSim.png" width="1505" />

&#x57FA;&#x672C;&#x7684;&#x306B;&#x306F;&#x4ECA;&#x307E;&#x3067;&#x3084;&#x3063;&#x305F;&#x3053;&#x3068;&#x3068;&#x306E;&#x9055;&#x3044;&#x306F;&#x30D0;&#x30EB;&#x30AF;&#x90E8;&#x306E;Trapping &#x304C;&#x5B9F;&#x88C5;&#x3055;&#x308C;&#x3066;&#x3044;&#x308B;&#x3053;&#x3068;&#x3060;&#x3051;

<verbatim>## defect density = fluence x eta 

## state 1: acceptor, E = Ec-0.42 eV, sigma_e = 2e-15 cm2, sigma_h=2e-14 cm2, eta = 1.613 cm-1
## state 2: acceptor, E = Ec-0.46 eV, sigma_e = 5e-15 cm2, sigma_h=5e-14 cm2, eta = 100 cm-1
## state 3: donor, E = Ev+0.36 eV, sigma_e = 2.5e-14 cm2, sigma_h =2.5e-15 cm2, eta = 0.9 cm-1

        Traps(
                        (
                        name="state1" acceptor conc=@<fluence*1.613>@
                        Level FromConductionBand        EnergyMid=0.42
                        eXsection=2E-15  hXsection=2E-14
                        ##eJfactor=1.0 hJfactor=1.0
                        )
                        (
                        name="state2" acceptor conc=@<fluence*100.0>@
                        Level FromConductionBand        EnergyMid=0.46
                        eXsection=5E-15  hXsection=5E-14
                        ##eJfactor=1.0 hJfactor=1.0
                        )
                        (
                        name="state3" donor conc=@<fluence*0.9>@
                        Level FromValenceBand   EnergyMid=0.36
                        eXsection=2.5E-14  hXsection=2.5E-15
                        ##eJfactor=1.0 hJfactor=1.0
                        )
                )</verbatim>

IV/CV/MIP&#x306A;&#x3069;&#x306E;SDEVICE&#x306B;&#x305D;&#x308C;&#x305E;&#x308C;Trap{}&#x95A2;&#x6570;&#x304C;&#x542B;&#x307E;&#x308C;&#x3066;&#x3044;&#x308B;&#x3002;

node 1 &#x3092;&#x8D70;&#x3089;&#x305B;&#x308B;&#x3002;

<img alt="Pixel2DIrradSimSDE.png" height="446" src="%ATTACHURLPATH%/Pixel2DIrradSimSDE.png" width="736" />

3 pixel&#x3068;&#x5DE6;&#x53F3;3&#x3064;&#x3065;&#x3064;&#x306E;&#x30AC;&#x30FC;&#x30C9;&#x30EA;&#x30F3;&#x30B0;&#x304C;&#x3042;&#x308B;&#x3002;&#x96FB;&#x6975;&#x9593;&#x306F;Pspray&#x3067;&#x5206;&#x96E2;&#x3002;

---++++ IV simulation

Non-irrad, 1e12 , 1e13, 1e14, 1e15, 1e16, 1e17 neq/cm2&#x306E;&#x7167;&#x5C04;&#x91CF;&#x3067;IV&#x30AB;&#x30FC;&#x30D6;&#x3092;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;

node 3-10&#x3092;&#x8D70;&#x3089;&#x305B;&#x305F;&#x5F8C;&#x30D7;&#x30ED;&#x30C3;&#x30C8;&#x3092;&#x898B;&#x308B;&#x3002;

&#x307E;&#x3068;&#x3081;&#x3066;&#x4F5C;&#x308B;&#x30B9;&#x30AF;&#x30EA;&#x30D7;&#x30C8;
<verbatim>svidual IV.tcl</verbatim>

&#x56F3;&#x306E;&#x3088;&#x3046;&#x306A;&#x30D7;&#x30ED;&#x30C3;&#x30C8;&#x304C;&#x3067;&#x304D;&#x308B;&#x3002;

<img alt="Pixel2DIrradSimIV.png" height="496" src="%ATTACHURLPATH%/Pixel2DIrradSimIV.png" width="818" />

&#x7167;&#x5C04;&#x91CF;&#x306B;&#x5FDC;&#x3058;&#x3066;&#x6848;&#x96FB;&#x6D41;&#x306E;&#x5897;&#x52A0;&#x3068;&#x3001;Break down &#x96FB;&#x5727;&#x306E;&#x4E0A;&#x6607;&#x304C;&#x307F;&#x3089;&#x308C;&#x308B;&#x3002;

PLOTBV&#x306F;IV&#x30AB;&#x30FC;&#x30D6;&#x304B;&#x3089;break down &#x96FB;&#x5727;&#x3092;&#x8AAD;&#x307F;&#x53D6;&#x308B;inspector.

---++++ CV simulation

Non-irrad, 1e12 , 1e13, 1e14, 1e15, 1e16, 1e17 neq/cm2&#x306E;&#x7167;&#x5C04;&#x91CF;&#x3067;CV&#x30AB;&#x30FC;&#x30D6;&#x3092;&#x30B7;&#x30DF;&#x30E5;&#x30EC;&#x30FC;&#x30B7;&#x30E7;&#x30F3;

node 18-24&#x3092;&#x8D70;&#x3089;&#x305B;&#x305F;&#x5F8C;&#x30D7;&#x30ED;&#x30C3;&#x30C8;&#x3092;&#x898B;&#x308B;&#x3002;

&#x307E;&#x3068;&#x3081;&#x3066;&#x4F5C;&#x308B;&#x30B9;&#x30AF;&#x30EA;&#x30D7;&#x30C8;

<pre>svidual CV.tcl</pre>

&#x56F3;&#x306E;&#x3088;&#x3046;&#x306A;&#x30D7;&#x30ED;&#x30C3;&#x30C8;&#x304C;&#x3067;&#x304D;&#x308B;&#x3002;

<img alt="Pixel2DIrradSimCV.png" height="457" src="%ATTACHURLPATH%/Pixel2DIrradSimCV.png" width="753" />

&#x540C;&#x3058;&#x96FB;&#x5727;&#x3067;&#x9759;&#x96FB;&#x5BB9;&#x91CF;&#x304C;&#x7167;&#x5C04;&#x91CF;&#x3068;&#x3068;&#x3082;&#x306B;&#x5897;&#x3048;&#x3066;&#x3044;&#x308B;&#x3002;&#x3053;&#x308C;&#x306F;&#x7A7A;&#x4E4F;&#x5C64;&#x306E;&#x539A;&#x307F;&#x304C;&#x8584;&#x3044;&#x304B;&#x3089;&#x3002; 1e16&#x3068;1e17&#x306F;&#x8981;&#x8ABF;&#x67FB;
---++++ &#x5B9F;&#x969B;&#x306B;100V&#x3067;&#x3069;&#x3053;&#x307E;&#x3067;&#x7A7A;&#x4E4F;&#x5316;&#x3057;&#x3066;&#x3044;&#x308B;&#x304B;&#xFF1F;

Non-irrad, 1e12 , 1e13, 1e14, 1e15, 1e16, 1e17 neq/cm2&#x306E;&#x7167;&#x5C04;&#x91CF;&#x3067;IRRADIATION&#x3092;&#x8D70;&#x3089;&#x305B;&#x308B;&#x3002;&#x3053;&#x308C;&#x306F;SDE&#x306B;trap&#x306E;&#x60C5;&#x5831;&#x3092;&#x52A0;&#x3048;&#x305F;&#x3060;&#x3051;&#x3002;

node 32-38&#x3092;&#x8D70;&#x3089;&#x305B;&#x305F;&#x5F8C; node 25-31&#x3067;&#x30D7;&#x30ED;&#x30C3;&#x30C8;&#x3092;&#x898B;&#x308B;&#x3002;WDEP_ins.tcl

<verbatim>create_field -dataset TDR -name n -function max(<DopingConcentration>/(abs(<DopingConcentration>)+1.0),0)
create_field -dataset TDR -name p -function max((-1.0*<DopingConcentration>)/(abs(<DopingConcentration>)+1.0),0)
create_field -dataset TDR -name DEP -function <n>*<eDensity>/(<DopingConcentration>+10)-<p>*<hDensity>/(<DopingConcentration>-10)-0.05</verbatim>

1e13 &#x3068;1e14 @ 100V&#x3067;&#x306E;&#x30AD;&#x30E3;&#x30EA;&#x30A2;&#x5BC6;&#x5EA6;&#x5206;&#x5E03;

<img alt="Pixel2DIrradSimMIPfig.png" height="443" src="%ATTACHURLPATH%/Pixel2DIrradSimDEP1e13.png" width="730" />
<img alt="Pixel2DIrradSimMIPfig.png" height="443" src="%ATTACHURLPATH%/Pixel2DIrradSimDEP1e14.png" width="730" />

---++++ MIP simulation

!Pixel2DMIP&#x306E;SDE&#x3092;&#x8D70;&#x3089;&#x305B;&#x308B;&#x3002;&#x3000;n46-52 &#x306F;MIP&#x306E;&#x5782;&#x76F4;&#x5165;&#x5C04;&#x3002;n212&#x306F;&#x70B9;&#x96FB;&#x8377;&#x3002;n175&#x306F;45&#x5EA6;&#x5165;&#x5C04;

<img alt="Pixel2DIrradSimMIPfig.png" height="443" src="%ATTACHURLPATH%/Pixel2DIrradSimMIPfig.png" width="730" />

<img alt="Pixel2DIrradSimMIPfigPoint.png" height="451" src="%ATTACHURLPATH%/Pixel2DIrradSimMIPfigPoint.png" width="743" />

<img alt="Pixel2DIrradSimMIPfigAngle.png" height="449" src="%ATTACHURLPATH%/Pixel2DIrradSimMIPfigAngle.png" width="742" />

&#x96FB;&#x6975;&#x306B;&#x6D41;&#x308C;&#x308B;&#x96FB;&#x6D41;&#x5206;&#x5E03;

<pre>svidual MIP.tcl<br /><br /></pre>

<img alt="Pixel2DIrradSimMIP.png" height="485" src="%ATTACHURLPATH%/Pixel2DIrradSimMIP.png" width="800" />

-- %USERSIG{AtlasjSilicon - 2020-05-27}%
Attachments
Topic attachments
I	Attachment	History	Action	Size	Date	Who
png	Pixel2DIrradSim.png	r1	manage	83.3 K	2020-05-27 - 14:27	AtlasjSilicon
png	Pixel2DIrradSimDEP1e13.png	r1	manage	77.8 K	2020-05-27 - 14:25	AtlasjSilicon
png	Pixel2DIrradSimDEP1e14.png	r1	manage	77.2 K	2020-05-27 - 14:25	AtlasjSilicon
png	Pixel2DIrradSimIV.png	r1	manage	97.1 K	2020-05-27 - 14:25	AtlasjSilicon
png	Pixel2DIrradSimMIP.png	r1	manage	97.1 K	2020-05-27 - 14:25	AtlasjSilicon
png	Pixel2DIrradSimMIPfig.png	r1	manage	98.0 K	2020-05-27 - 14:25	AtlasjSilicon
png	Pixel2DIrradSimMIPfigAngle.png	r1	manage	97.4 K	2020-05-27 - 14:25	AtlasjSilicon
png	Pixel2DIrradSimMIPfigPoint.png	r1	manage	95.2 K	2020-05-27 - 14:25	AtlasjSilicon
png	Pixel2DIrradSimSDE.png	r1	manage	81.3 K	2020-05-27 - 14:25	AtlasjSilicon
This topic: Main > TCADSimulationInformation > Tutorial4thTCADWorkshop > Tutorial4thTCADDay4
Topic revision: r1 - 2020-05-27 - AtlasjSilicon