RD53A testing@CERN

RD53A testing@CERN
- KEK53-4
- KEK53-5
- KEK53-6
- KEK53-7
- KEK53-8
- KEK53-9
- KEK53-10
- KEK53-11
- KEK53-12
- KEK53-13
- Comments

KEK53-4

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-5

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-6

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4-1	無		STD
		4-2	無		Small

KEK53-7

ch-pitch : 25×100um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-8

ch-pitch : 25×100um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-9

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	thick	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4-1	無		STD
		4-2	無		Small

KEK53-10

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
thick	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-11

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
thick	STD	1	有	10kΩ/□	Large
		2	有	10kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-12

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	3kΩ/□	Large
		2	有	3kΩ/□	STD
		3	無		Large
		4	無		STD

KEK53-13

ch-pitch : 50×50um

BR下 SiO2膜	PolySi-Al間のSiO2膜	Region	Poly-Si		N+ size
STD	STD	1	有	30kΩ/□	Large
		2	有	30kΩ/□	STD
		3	無		Large
		4	無		STD

Atlasj Silicon - 2018-07-06

Comments

Attachments

Topic attachments
I	Attachment	History	Action	Size	Date	Who
png	KEK53-11_no0_region1.png	r1	manage	25.7 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_no0_region2.png	r1	manage	25.8 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_no0_region3.png	r1	manage	22.6 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_no0_region4.png	r1	manage	22.4 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_region1.png	r1	manage	26.8 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_region2.png	r1	manage	26.3 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_region3.png	r1	manage	22.1 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-11_region4.png	r1	manage	22.3 K	2018-07-06 - 10:27	AtlasjSilicon
png	KEK53-12_no0_region1.png	r1	manage	25.4 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_no0_region2.png	r1	manage	25.3 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_no0_region3.png	r1	manage	22.0 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_no0_region4.png	r1	manage	21.6 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_region1.png	r1	manage	27.4 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_region2.png	r1	manage	26.6 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_region3.png	r1	manage	22.2 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-12_region4.png	r1	manage	21.8 K	2018-07-06 - 12:04	AtlasjSilicon
png	KEK53-13_no0_region1.png	r1	manage	24.5 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_no0_region2.png	r1	manage	24.7 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_no0_region3.png	r1	manage	22.4 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_no0_region4.png	r1	manage	22.3 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_region1.png	r1	manage	23.1 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_region2.png	r1	manage	25.1 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_region3.png	r1	manage	22.7 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-13_region4.png	r1	manage	23.1 K	2018-07-06 - 12:13	AtlasjSilicon
png	KEK53-4_no0_region1.png	r1	manage	27.3 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_no0_region2.png	r1	manage	25.0 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_no0_region3.png	r1	manage	22.7 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_no0_region4.png	r1	manage	22.8 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_region1.png	r1	manage	26.0 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_region2.png	r1	manage	24.1 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_region3.png	r1	manage	22.9 K	2018-07-06 - 09:49	AtlasjSilicon
png	KEK53-4_region4.png	r1	manage	22.5 K	2018-07-06 - 09:49	AtlasjSilicon

Topic revision: r2 - 2018-07-06 - AtlasjSilicon

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