RD53A testing@CERN
KEK53-4
ch-pitch : 50×50um
BR下 SiO2膜 : STD
PolySi-Al間のSiO2膜 : STD
Poly-Si抵抗 : 10kΩ/□
Region |
Poly-Si |
N+ size |
plot |
1 |
有 |
Large |
|
|
2 |
STD |
|
|
3 |
無 |
Large |
|
|
4 |
STD |
|
|
KEK53-5
ch-pitch : 50×50um
BR下 SiO2膜 : STD
PolySi-Al間のSiO2膜 : STD
Poly-Si抵抗 : 10kΩ/□
Region |
Poly-Si |
N+ size |
plot |
1 |
有 |
Large |
|
|
2 |
STD |
|
|
3 |
無 |
Large |
|
|
4 |
STD |
|
|
KEK53-6
ch-pitch : 50×50um
BR下 SiO2膜 : STD
PolySi-Al間のSiO2膜 : STD
Poly-Si抵抗 : 10kΩ/□
Region |
Poly-Si |
N+ size |
plot |
1 |
有 |
Large |
|
|
2 |
STD |
|
|
3 |
無 |
Large |
|
|
4-1 |
STD |
|
|
4-2 |
Small |
|
|
KEK53-7
ch-pitch : 25×100um
BR下 SiO2膜 : STD
PolySi-Al間のSiO2膜 : STD
Poly-Si抵抗 : 10kΩ/□
Region |
Poly-Si |
N+ size |
plot |
1 |
有 |
Large |
|
|
2 |
STD |
|
|
3 |
無 |
Large |
|
|
4 |
STD |
|
|
KEK53-8
ch-pitch : 25×100um
BR下 SiO2膜 : STD
PolySi-Al間のSiO2膜 : STD
Poly-Si抵抗 : 10kΩ/□
Region |
Poly-Si |
N+ size |
plot |
1 |
有 |
Large |
|
|
2 |
STD |
|
|
3 |
無 |
Large |
|
|
4 |
STD |
|
|
KEK53-9
ch-pitch : 50×50um
BR下 SiO2膜 : STD
PolySi-Al間のSiO2膜 : thick
Poly-Si抵抗 : 10kΩ/□
Region |
Poly-Si |
N+ size |
plot |
1 |
有 |
Large |
|
|
2 |
STD |
|
|
3 |
無 |
Large |
|
|
4-1 |
STD |
|
|
4-2 |
Small |
|
|
KEK53-10
ch-pitch : 50×50um
BR下 SiO2膜 : thick
PolySi-Al間のSiO2膜 : STD
Poly-Si抵抗 : 10kΩ/□
Region |
Poly-Si |
N+ size |
plot |
1 |
有 |
Large |
|
|
2 |
STD |
|
|
3 |
無 |
Large |
|
|
4 |
STD |
|
|
KEK53-11
ch-pitch : 50×50um
BR下 SiO2膜 : thick
PolySi-Al間のSiO2膜 : STD
Poly-Si抵抗 : 10kΩ/□
Region |
Poly-Si |
N+ size |
plot |
1 |
有 |
Large |
|
|
2 |
STD |
|
|
3 |
無 |
Large |
|
|
4 |
STD |
|
|
KEK53-12
ch-pitch : 50×50um
BR下 SiO2膜 : STD
PolySi-Al間のSiO2膜 : STD
Poly-Si抵抗 : 3kΩ/□
Region |
Poly-Si |
N+ size |
plot |
1 |
有 |
Large |
|
|
2 |
STD |
|
|
3 |
無 |
Large |
|
|
4 |
STD |
|
|
KEK53-13
ch-pitch : 50×50um
BR下 SiO2膜 : STD
PolySi-Al間のSiO2膜 : STD
Poly-Si抵抗 : 30kΩ/□
Region |
Poly-Si |
N+ size |
plot |
1 |
有 |
Large |
|
|
2 |
STD |
|
|
3 |
無 |
Large |
|
|
4 |
STD |
|
|
--
Atlasj Silicon - 2018-07-06
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July2018CERNTBlog > RD53AtestingatCERN
Topic revision: r3 - 2018-07-06 - AtlasjSilicon