MOS capacitor Measurement

First Example Measurement

type1 (average)

Al-SiO2-Si(0-1) : 2.6pF (50kHz~10MHz)

Al-SiO2-p+(3-4) : 130pF (1kHz~1MHz)

Al-SiN-SiO2-Si(0-2) : 55pF (5kHz~100kHz)

ATLAS98 (現SCTのセンサー)のテストストラクチュア

-- Koji Nakamura - 2016-04-01

First measurement results

Slide from K.Sato is here

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PDFpdf ATLAS98B_HPK2225938754991217.pdf r1 manage 5129.8 K 2016-04-01 - 15:49 KojiNakamura  
PDFpdf MOS.pdf r1 manage 2891.4 K 2016-10-11 - 09:54 AtlasjSilicon  
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Topic revision: r4 - 2016-10-11 - AtlasjSilicon
 
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