MOS capacitor Measurement
First Example Measurement
type1 (average)
Al-SiO2-Si(0-1) : 2.6pF (50kHz~10MHz)
Al-SiO2-p+(3-4) : 130pF (1kHz~1MHz)
Al-SiN-SiO2-Si(0-2) : 55pF (5kHz~100kHz)
ATLAS98 (現SCTのセンサー)のテストストラクチュア
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Koji Nakamura - 2016-04-01
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Topic revision: r2 - 2016-04-12 - AtlasjSilicon