Difference: RD53AProbeCard (1 vs. 9)

Revision 92020-09-09 - KatsuyaSato

Line: 1 to 1
 
META TOPICPARENT name="RD53ADAQdevelopment"

RD53A Probe Card

Line: 30 to 31
  富士B4のnew clean roomのprobe stationの使い方と,probe cardを用いたquad sensorのテストの仕方
Initialization
Changed:
<
<
  1. vacumeをON.vacumeはprobe stationのstageのchuckを固定するために使用.
>
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  1. vacumeをON.vacumeはprobe stationのstageのchuckを固定するために使用.足元にある.
 
  1. probe stationの電源をON.スイッチはprobe stationの右側面にある.
  2. probe station用のPCの電源をON.probe stationの下側の扉を開けるとある.PCの電源を入れると自動的にloginしsoftwareが開く.
  3. softwareが立ち上がったら,probe stationのresetスイッチを押す.probe stationの電源の下にある.
Line: 41 to 42
 
  1. 手前のねじ?を回して,chuck部分を引き出す.
  2. [software] switch off chuck vacumeをクリック.(シュッという音がなる.)
  3. sensorを円盤に載せる.(回転などに注意)
Changed:
<
<
  1. [software] switch on chuck vacumeで真空を引き,センサーを固定する.真空を引く範囲は,probe stationお右側のCHUCK (R=)75mm,100mm,150mm,200mmで変えられる.(Quadでは75mmと100mmだけ使用)
Alignment
>
>
  1. [software] switch on chuck vacumeで真空を引き,センサーを固定する.真空を引く範囲は,probe stationの右側のCHUCK (R=)75mm,100mm,150mm,200mmで変えられる.(今回は75mmと100mmだけ使用)
Preparation
 
  1. [software] project -> open -> (C:\Users\Public\Documents\Velox\FFKK20202_4_7_RD53Aprobe.spp)
  2. [software] move to home positionをクリック.
  3. 顕微鏡を下げるために,スイッチ(顕微鏡近くにある)でdownをする.
Changed:
<
<
  1. [software]
>
>
  1. [software] 顕微鏡のピントを合わせるためにScope Stage modeにしてscopeの位置を下げ,needleが見えるようにする.
  2. レバーを(完全の一歩手前まで)下げる.needleとASICはぶつからないことを確認する.
  3. Chuck Stage modeにして,sensorをneedleに近づけ,ボケながらもASICのpadが見える位置までstageを上げる.
Alignment
  1. Chuck Stage modeで,chipXの左端のpadをクリックし,stageを左に移動させ,chipXの右端のpadをクリックする.→回転alignmentが行われる.
  2. scopeの倍率を上げ,回転alignmentの微調整を行う.
  3. needleの一番端が(chipXの)padの左端から2番目,needleの一番右端がpadの右端から2番目に合うようにstageを移動させる.( RD53A_Manual_V3-51.pdf のFig.9,10を参照)
  4. (needle1本だけ短い?のがあるので,全体のneedleがpadの下側に当たるようにすると良い.)
  5. Scope modeにし,全てのneedleがpadに当たることを確認する.(要はASICのalignmentができているか)

 
Changed:
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<
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Line: 59 to 76
 
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META FILEATTACHMENT attachment="ProbeStationScreen.png" attr="" comment="" date="1599613458" name="ProbeStationScreen.png" path="ProbeStationScreen.png" size="1040668" user="KatsuyaSato" version="1"
Added:
>
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META FILEATTACHMENT attachment="ProbeStationPhoto1.png" attr="" comment="" date="1599618510" name="ProbeStationPhoto1.png" path="ProbeStationPhoto1.png" size="3736813" user="KatsuyaSato" version="1"
META FILEATTACHMENT attachment="ProbeCard_Sensor.png" attr="" comment="" date="1599618551" name="ProbeCard_Sensor.png" path="ProbeCard_Sensor.png" size="3883729" user="KatsuyaSato" version="1"
META FILEATTACHMENT attachment="ProberSoftwareScreen.png" attr="" comment="" date="1599618572" name="ProberSoftwareScreen.png" path="ProberSoftwareScreen.png" size="1721014" user="KatsuyaSato" version="1"
META FILEATTACHMENT attachment="RD53A_Manual_V3-51.pdf" attr="" comment="" date="1599620599" name="RD53A_Manual_V3-51.pdf" path="RD53A_Manual_V3-51.pdf" size="9014986" user="KatsuyaSato" version="1"

Revision 82020-09-09 - KatsuyaSato

Line: 1 to 1
 
META TOPICPARENT name="RD53ADAQdevelopment"

RD53A Probe Card

Line: 48 to 48
 
  1. 顕微鏡を下げるために,スイッチ(顕微鏡近くにある)でdownをする.
  2. [software]
Added:
>
>
 
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Line: 55 to 58
 
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META FILEATTACHMENT attachment="PadPosition.xls" attr="" comment="" date="1525676775" name="PadPosition.xls" path="PadPosition.xls" size="45568" user="AtlasjSilicon" version="2"
Added:
>
>
META FILEATTACHMENT attachment="ProbeStationScreen.png" attr="" comment="" date="1599613458" name="ProbeStationScreen.png" path="ProbeStationScreen.png" size="1040668" user="KatsuyaSato" version="1"

Revision 72020-09-07 - KatsuyaSato

Line: 1 to 1
 
META TOPICPARENT name="RD53ADAQdevelopment"

RD53A Probe Card

Line: 42 to 42
 
  1. [software] switch off chuck vacumeをクリック.(シュッという音がなる.)
  2. sensorを円盤に載せる.(回転などに注意)
  3. [software] switch on chuck vacumeで真空を引き,センサーを固定する.真空を引く範囲は,probe stationお右側のCHUCK (R=)75mm,100mm,150mm,200mmで変えられる.(Quadでは75mmと100mmだけ使用)
Added:
>
>
Alignment
 
  1. [software] project -> open -> (C:\Users\Public\Documents\Velox\FFKK20202_4_7_RD53Aprobe.spp)
Changed:
<
<
>
>
  1. [software] move to home positionをクリック.
  2. 顕微鏡を下げるために,スイッチ(顕微鏡近くにある)でdownをする.
  3. [software]
 
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META FILEATTACHMENT attachment="DSC_3340.JPG" attr="" comment="" date="1518197150" name="DSC_3340.JPG" path="DSC_3340.JPG" size="6089939" user="KojiNakamura" version="1"

Revision 62020-09-07 - KatsuyaSato

Line: 1 to 1
 
META TOPICPARENT name="RD53ADAQdevelopment"

RD53A Probe Card

Line: 27 to 27
 

Probe Station

How to Use

Changed:
<
<
  1. 富士B4の
>
>
富士B4のnew clean roomのprobe stationの使い方と,probe cardを用いたquad sensorのテストの仕方
Initialization
  1. vacumeをON.vacumeはprobe stationのstageのchuckを固定するために使用.
  2. probe stationの電源をON.スイッチはprobe stationの右側面にある.
  3. probe station用のPCの電源をON.probe stationの下側の扉を開けるとある.PCの電源を入れると自動的にloginしsoftwareが開く.
  4. softwareが立ち上がったら,probe stationのresetスイッチを押す.probe stationの電源の下にある.
  5. [software] initializeをクリック.原点合わせなどを行う.
Loading Sensor
  1. probe station左側にあるレバーが上に上がっていることを確認.このレバーはマニュアルでstageを上下させる.
  2. [software] chuck load positionをクリック.
  3. 手前のねじ?を回して,chuck部分を引き出す.
  4. [software] switch off chuck vacumeをクリック.(シュッという音がなる.)
  5. sensorを円盤に載せる.(回転などに注意)
  6. [software] switch on chuck vacumeで真空を引き,センサーを固定する.真空を引く範囲は,probe stationお右側のCHUCK (R=)75mm,100mm,150mm,200mmで変えられる.(Quadでは75mmと100mmだけ使用)
  7. [software] project -> open -> (C:\Users\Public\Documents\Velox\FFKK20202_4_7_RD53Aprobe.spp)
 
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Revision 52020-09-07 - KatsuyaSato

Line: 1 to 1
 
META TOPICPARENT name="RD53ADAQdevelopment"

RD53A Probe Card

Changed:
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<
>
>

 

Introduction

Check ASIC before and after flip chip to check flip chip bump bonding quality.

Line: 21 to 21
 

Photo

Changed:
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DSC_3339.JPG DSC_3340.JPG DSC_3341.JPG DSC_3342.JPG
DSC_3339  DSC_3340  DSC_3341  DSC_3342 
DSC_3343.JPG DSC_3344.JPG ProbeCard_Sensor.png ProberSoftwareScreen.png
DSC_3343  DSC_3344  ProbeCard_Sensor  ProberSoftwareScreen 
ProbeStationPhoto1.png ProbeStationScreen.png    
ProbeStationPhoto1  ProbeStationScreen    
There are 10 images in this page

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>

DSC_3339.JPG DSC_3340.JPG DSC_3341.JPG DSC_3342.JPG
DSC_3339  DSC_3340  DSC_3341  DSC_3342 
DSC_3343.JPG DSC_3344.JPG ProbeCard_Sensor.png ProberSoftwareScreen.png
DSC_3343  DSC_3344  ProbeCard_Sensor  ProberSoftwareScreen 
ProbeStationPhoto1.png ProbeStationScreen.png    
ProbeStationPhoto1  ProbeStationScreen    
There are 10 images in this page

  -- Koji Nakamura - 2018-02-09
Added:
>
>

Probe Station

How to Use

  1. 富士B4の
 
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Revision 42018-05-21 - AtlasjSilicon

Line: 1 to 1
 
META TOPICPARENT name="RD53ADAQdevelopment"

RD53A Probe Card

Line: 13 to 13
  Based on the !RD53A single chip card but remove unnecessary circuit and used only 98 pins for probing. (Thanks Maurice to identify the necessary pins)
Changed:
<
<
Design : https://cernbox.cern.ch/index.php/s/GpruAhqeFO4QhvE/download?path=%2FKEK%2FRD53A_ProbeCard&files=RD53A_ProbCard.pdf
>
>
Design : https://cernbox.cern.ch/index.php/s/MiwFjlIDetdQ8BC?path=%2FKEK%2FRD53A_ProbeCard
  Pin Assignment : PadPosition.xls

Revision 32018-05-07 - AtlasjSilicon

Line: 1 to 1
 
META TOPICPARENT name="RD53ADAQdevelopment"

RD53A Probe Card

Line: 31 to 31
 
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Changed:
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META FILEATTACHMENT attachment="PadPosition.xls" attr="" comment="" date="1518198535" name="PadPosition.xls" path="PadPosition.xls" size="46080" user="KojiNakamura" version="1"
>
>
META FILEATTACHMENT attachment="PadPosition.xls" attr="" comment="" date="1525676775" name="PadPosition.xls" path="PadPosition.xls" size="45568" user="AtlasjSilicon" version="2"

Revision 22018-05-02 - AtlasjSilicon

Line: 1 to 1
 
META TOPICPARENT name="RD53ADAQdevelopment"

RD53A Probe Card

Line: 7 to 7
  Check ASIC before and after flip chip to check flip chip bump bonding quality.
Added:
>
>

log

 

Design

Based on the !RD53A single chip card but remove unnecessary circuit and used only 98 pins for probing. (Thanks Maurice to identify the necessary pins)

Revision 12018-02-09 - KojiNakamura

Line: 1 to 1
Added:
>
>
META TOPICPARENT name="RD53ADAQdevelopment"

RD53A Probe Card

Introduction

Check ASIC before and after flip chip to check flip chip bump bonding quality.

Design

Based on the !RD53A single chip card but remove unnecessary circuit and used only 98 pins for probing. (Thanks Maurice to identify the necessary pins)

Design : https://cernbox.cern.ch/index.php/s/GpruAhqeFO4QhvE/download?path=%2FKEK%2FRD53A_ProbeCard&files=RD53A_ProbCard.pdf

Pin Assignment : PadPosition.xls

Photo

DSC_3339.JPG DSC_3340.JPG DSC_3341.JPG DSC_3342.JPG
DSC_3339  DSC_3340  DSC_3341  DSC_3342 
DSC_3343.JPG DSC_3344.JPG ProbeCard_Sensor.png ProberSoftwareScreen.png
DSC_3343  DSC_3344  ProbeCard_Sensor  ProberSoftwareScreen 
ProbeStationPhoto1.png ProbeStationScreen.png    
ProbeStationPhoto1  ProbeStationScreen    
There are 10 images in this page

-- Koji Nakamura - 2018-02-09

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